6/21/2010	10:12:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	10:12:18 AM	Recipe started at 10:12 AM
6/21/2010	10:12:18 AM	H2 valve closed
6/21/2010	10:12:18 AM	BCl3 valve closed
6/21/2010	10:12:18 AM	PH3 valve closed
6/21/2010	10:12:18 AM	SiCl4 pre valve closed
6/21/2010	10:12:18 AM	SiCl4 post valve closed
6/21/2010	10:12:18 AM	Main Vac valve closed
6/21/2010	10:12:18 AM	Bypass valve closed
6/21/2010	10:12:18 AM	Bubbler valve closed
6/21/2010	10:12:18 AM	Helium valve opened
6/21/2010	10:12:18 AM	Helium MFC set to  500.000000
6/21/2010	10:12:18 AM	H2 MFC set to  0.000000
6/21/2010	10:12:18 AM	BCl3 MFC set to  0.000000
6/21/2010	10:12:18 AM	PHl3 MFC set to  0.000000
6/21/2010	10:12:18 AM	SiCl4 MFC set to  0.000000
6/21/2010	10:12:18 AM	Bypass solenoid MFC set to  0.000000
6/21/2010	10:12:18 AM	Tube furnace set to 0
6/21/2010	10:13:38 AM	Helium valve closed
6/21/2010	10:13:38 AM	H2 valve closed
6/21/2010	10:13:38 AM	BCl3 valve closed
6/21/2010	10:13:38 AM	PH3 valve closed
6/21/2010	10:13:38 AM	SiCl4 pre valve closed
6/21/2010	10:13:38 AM	SiCl4 post valve closed
6/21/2010	10:13:38 AM	Main Vac valve closed
6/21/2010	10:13:38 AM	Bypass valve closed
6/21/2010	10:13:38 AM	Bubbler valve closed
6/21/2010	10:13:38 AM	Helium MFC set to  0.000000
6/21/2010	10:13:38 AM	H2 MFC set to  0.000000
6/21/2010	10:13:38 AM	BCl3 MFC set to  0.000000
6/21/2010	10:13:38 AM	PHl3 MFC set to  0.000000
6/21/2010	10:13:38 AM	SiCl4 MFC set to  0.000000
6/21/2010	10:13:38 AM	Bypass solenoid MFC set to  0.000000
6/21/2010	10:13:38 AM	Tube furnace set to 0
6/21/2010	10:13:39 AM	Run finished at 10:13 AM
6/21/2010	10:13:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	10:28:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	10:28:35 AM	Recipe started at 10:28 AM
6/21/2010	10:28:35 AM	Helium valve closed
6/21/2010	10:28:35 AM	H2 valve closed
6/21/2010	10:28:35 AM	BCl3 valve closed
6/21/2010	10:28:35 AM	PH3 valve closed
6/21/2010	10:28:35 AM	SiCl4 pre valve closed
6/21/2010	10:28:35 AM	SiCl4 post valve closed
6/21/2010	10:28:35 AM	Main Vac valve closed
6/21/2010	10:28:35 AM	Bubbler valve closed
6/21/2010	10:28:35 AM	Bypass valve opened
6/21/2010	10:28:35 AM	Helium MFC set to  0.000000
6/21/2010	10:28:35 AM	H2 MFC set to  0.000000
6/21/2010	10:28:35 AM	BCl3 MFC set to  0.000000
6/21/2010	10:28:35 AM	PHl3 MFC set to  0.000000
6/21/2010	10:28:35 AM	SiCl4 MFC set to  0.000000
6/21/2010	10:28:35 AM	Bypass solenoid MFC set to  0.000000
6/21/2010	10:28:35 AM	Tube furnace set to 0
6/21/2010	10:29:23 AM	Helium valve closed
6/21/2010	10:29:23 AM	H2 valve closed
6/21/2010	10:29:23 AM	BCl3 valve closed
6/21/2010	10:29:23 AM	PH3 valve closed
6/21/2010	10:29:23 AM	SiCl4 pre valve closed
6/21/2010	10:29:23 AM	SiCl4 post valve closed
6/21/2010	10:29:23 AM	Bubbler valve closed
6/21/2010	10:29:23 AM	Main Vac valve opened
6/21/2010	10:29:23 AM	Bypass valve opened
6/21/2010	10:29:23 AM	Helium MFC set to  0.000000
6/21/2010	10:29:23 AM	H2 MFC set to  0.000000
6/21/2010	10:29:23 AM	BCl3 MFC set to  0.000000
6/21/2010	10:29:23 AM	PHl3 MFC set to  0.000000
6/21/2010	10:29:23 AM	SiCl4 MFC set to  0.000000
6/21/2010	10:29:23 AM	Bypass solenoid MFC set to  0.000000
6/21/2010	10:29:23 AM	Tube furnace set to 0
6/21/2010	10:29:24 AM	Run finished at 10:29 AM
6/21/2010	10:29:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	10:31:08 AM	Helium MFC set to  100.000000
6/21/2010	10:31:12 AM	Helium valve opened
6/21/2010	10:31:22 AM	Helium MFC set to  500.000000
6/21/2010	10:33:42 AM	Helium MFC set to  0.000000
6/21/2010	10:33:44 AM	Helium valve closed
6/21/2010	10:34:21 AM	Helium MFC set to  100.000000
6/21/2010	10:34:23 AM	Helium valve opened
6/21/2010	10:34:35 AM	Helium MFC set to  500.000000
6/21/2010	10:37:28 AM	Helium valve closed
6/21/2010	10:37:31 AM	Helium MFC set to  0.000000
6/21/2010	10:37:58 AM	Helium MFC set to  100.000000
6/21/2010	10:38:00 AM	Helium valve opened
6/21/2010	10:38:10 AM	Helium MFC set to  500.000000
6/21/2010	10:43:35 AM	Helium valve closed
6/21/2010	10:43:38 AM	Helium MFC set to  0.000000
6/21/2010	10:44:16 AM	Helium MFC set to  100.000000
6/21/2010	10:44:18 AM	Helium valve opened
6/21/2010	10:44:26 AM	Helium MFC set to  500.000000
6/21/2010	10:46:57 AM	Helium valve closed
6/21/2010	10:47:01 AM	Helium MFC set to  0.000000
6/21/2010	10:47:49 AM	Helium MFC set to  100.000000
6/21/2010	10:47:51 AM	Helium valve opened
6/21/2010	10:48:00 AM	Helium MFC set to  500.000000
6/21/2010	10:50:42 AM	Helium valve closed
6/21/2010	10:50:45 AM	Helium MFC set to  0.000000
6/21/2010	10:51:26 AM	Helium MFC set to  100.000000
6/21/2010	10:51:28 AM	Helium valve opened
6/21/2010	10:51:36 AM	Helium MFC set to  500.000000
6/21/2010	10:57:09 AM	Helium valve closed
6/21/2010	10:57:12 AM	Helium MFC set to  0.000000
6/21/2010	10:58:13 AM	Helium MFC set to  100.000000
6/21/2010	10:58:14 AM	Helium valve opened
6/21/2010	10:58:25 AM	Helium MFC set to  500.000000
6/21/2010	11:02:30 AM	Helium MFC set to  500.000000
6/21/2010	11:02:31 AM	Helium valve closed
6/21/2010	11:02:35 AM	Helium MFC set to  0.000000
6/21/2010	11:03:25 AM	Helium MFC set to  100.000000
6/21/2010	11:03:26 AM	Helium valve opened
6/21/2010	11:03:31 AM	Helium MFC set to  500.000000
6/21/2010	11:08:00 AM	Helium MFC set to  500.000000
6/21/2010	11:08:01 AM	Helium valve closed
6/21/2010	11:08:03 AM	Helium MFC set to  0.000000
6/21/2010	11:08:49 AM	Helium MFC set to  100.000000
6/21/2010	11:08:51 AM	Helium valve opened
6/21/2010	11:08:58 AM	Helium MFC set to  500.000000
6/21/2010	11:14:39 AM	Helium valve closed
6/21/2010	11:14:42 AM	Helium MFC set to  0.000000
6/21/2010	11:15:48 AM	Helium MFC set to  100.000000
6/21/2010	11:15:50 AM	Helium valve opened
6/21/2010	11:15:59 AM	Helium MFC set to  500.000000
6/21/2010	11:18:45 AM	Helium MFC set to  500.000000
6/21/2010	11:18:46 AM	Helium valve closed
6/21/2010	11:18:48 AM	Helium MFC set to  0.000000
6/21/2010	11:22:09 AM	Helium MFC set to  100.000000
6/21/2010	11:22:12 AM	Helium valve opened
6/21/2010	11:22:23 AM	Helium MFC set to  500.000000
6/21/2010	11:25:43 AM	Helium valve closed
6/21/2010	11:25:45 AM	Helium MFC set to  0.000000
6/21/2010	11:29:17 AM	Helium MFC set to  100.000000
6/21/2010	11:29:20 AM	Helium valve opened
6/21/2010	11:29:36 AM	Helium MFC set to  500.000000
6/21/2010	11:30:51 AM	Helium valve closed
6/21/2010	11:30:53 AM	Helium MFC set to  0.000000
6/21/2010	11:32:27 AM	Recipe started at 11:32 AM
6/21/2010	11:32:27 AM	Helium valve closed
6/21/2010	11:32:27 AM	BCl3 valve closed
6/21/2010	11:32:27 AM	PH3 valve closed
6/21/2010	11:32:27 AM	SiCl4 pre valve closed
6/21/2010	11:32:27 AM	SiCl4 post valve closed
6/21/2010	11:32:27 AM	Main Vac valve closed
6/21/2010	11:32:27 AM	Bypass valve closed
6/21/2010	11:32:27 AM	Bubbler valve closed
6/21/2010	11:32:27 AM	H2 valve opened
6/21/2010	11:32:27 AM	Helium MFC set to  0.000000
6/21/2010	11:32:27 AM	H2 MFC set to  500.000000
6/21/2010	11:32:27 AM	BCl3 MFC set to  0.000000
6/21/2010	11:32:27 AM	PHl3 MFC set to  0.000000
6/21/2010	11:32:27 AM	SiCl4 MFC set to  0.000000
6/21/2010	11:32:27 AM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:32:28 AM	Tube furnace set to 1000
6/21/2010	11:33:48 AM	Helium valve closed
6/21/2010	11:33:48 AM	BCl3 valve closed
6/21/2010	11:33:48 AM	PH3 valve closed
6/21/2010	11:33:48 AM	SiCl4 pre valve closed
6/21/2010	11:33:48 AM	SiCl4 post valve closed
6/21/2010	11:33:48 AM	Main Vac valve closed
6/21/2010	11:33:48 AM	Bypass valve closed
6/21/2010	11:33:48 AM	H2 valve opened
6/21/2010	11:33:48 AM	Bubbler valve opened
6/21/2010	11:33:48 AM	Helium MFC set to  0.000000
6/21/2010	11:33:48 AM	H2 MFC set to  500.000000
6/21/2010	11:33:48 AM	BCl3 MFC set to  0.000000
6/21/2010	11:33:48 AM	PHl3 MFC set to  0.000000
6/21/2010	11:33:48 AM	SiCl4 MFC set to  0.000000
6/21/2010	11:33:48 AM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:33:48 AM	Tube furnace set to 1000
6/21/2010	11:53:48 AM	Helium valve closed
6/21/2010	11:53:48 AM	PH3 valve closed
6/21/2010	11:53:48 AM	Main Vac valve closed
6/21/2010	11:53:48 AM	Bypass valve closed
6/21/2010	11:53:48 AM	H2 valve opened
6/21/2010	11:53:48 AM	BCl3 valve opened
6/21/2010	11:53:48 AM	SiCl4 pre valve opened
6/21/2010	11:53:48 AM	SiCl4 post valve opened
6/21/2010	11:53:48 AM	Bubbler valve opened
6/21/2010	11:53:48 AM	Helium MFC set to  0.000000
6/21/2010	11:53:48 AM	H2 MFC set to  500.000000
6/21/2010	11:53:48 AM	BCl3 MFC set to  35.000000
6/21/2010	11:53:48 AM	PHl3 MFC set to  0.000000
6/21/2010	11:53:48 AM	SiCl4 MFC set to  50.000000
6/21/2010	11:53:48 AM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:53:49 AM	Tube furnace set to 1000
6/21/2010	12:08:49 PM	Helium valve closed
6/21/2010	12:08:49 PM	BCl3 valve closed
6/21/2010	12:08:49 PM	PH3 valve closed
6/21/2010	12:08:49 PM	SiCl4 pre valve closed
6/21/2010	12:08:49 PM	SiCl4 post valve closed
6/21/2010	12:08:49 PM	Main Vac valve closed
6/21/2010	12:08:49 PM	Bypass valve closed
6/21/2010	12:08:49 PM	H2 valve opened
6/21/2010	12:08:49 PM	Bubbler valve opened
6/21/2010	12:08:49 PM	Helium MFC set to  0.000000
6/21/2010	12:08:49 PM	H2 MFC set to  500.000000
6/21/2010	12:08:49 PM	BCl3 MFC set to  0.000000
6/21/2010	12:08:49 PM	PHl3 MFC set to  0.000000
6/21/2010	12:08:49 PM	SiCl4 MFC set to  0.000000
6/21/2010	12:08:49 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	12:08:49 PM	Tube furnace set to 750
6/21/2010	12:28:49 PM	H2 valve closed
6/21/2010	12:28:49 PM	BCl3 valve closed
6/21/2010	12:28:49 PM	PH3 valve closed
6/21/2010	12:28:49 PM	SiCl4 pre valve closed
6/21/2010	12:28:49 PM	SiCl4 post valve closed
6/21/2010	12:28:49 PM	Main Vac valve closed
6/21/2010	12:28:49 PM	Bypass valve closed
6/21/2010	12:28:49 PM	Helium valve opened
6/21/2010	12:28:49 PM	Bubbler valve opened
6/21/2010	12:28:49 PM	Helium MFC set to  500.000000
6/21/2010	12:28:49 PM	H2 MFC set to  0.000000
6/21/2010	12:28:49 PM	BCl3 MFC set to  0.000000
6/21/2010	12:28:49 PM	PHl3 MFC set to  0.000000
6/21/2010	12:28:49 PM	SiCl4 MFC set to  0.000000
6/21/2010	12:28:49 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	12:28:49 PM	Tube furnace set to 0
6/21/2010	12:48:49 PM	Helium valve closed
6/21/2010	12:48:49 PM	H2 valve closed
6/21/2010	12:48:49 PM	BCl3 valve closed
6/21/2010	12:48:49 PM	PH3 valve closed
6/21/2010	12:48:49 PM	SiCl4 pre valve closed
6/21/2010	12:48:49 PM	SiCl4 post valve closed
6/21/2010	12:48:49 PM	Main Vac valve closed
6/21/2010	12:48:49 PM	Bypass valve closed
6/21/2010	12:48:49 PM	Bubbler valve closed
6/21/2010	12:48:49 PM	Helium MFC set to  0.000000
6/21/2010	12:48:49 PM	H2 MFC set to  0.000000
6/21/2010	12:48:49 PM	BCl3 MFC set to  0.000000
6/21/2010	12:48:49 PM	PHl3 MFC set to  0.000000
6/21/2010	12:48:49 PM	SiCl4 MFC set to  0.000000
6/21/2010	12:48:49 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	12:48:49 PM	Tube furnace set to 0
6/21/2010	12:48:49 PM	Run finished at 12:48 PM
6/21/2010	1:25:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/21/2010	1:25:26 PM	Recipe started at 1:25 PM
6/21/2010	1:25:26 PM	Helium valve closed
6/21/2010	1:25:26 PM	H2 valve closed
6/21/2010	1:25:26 PM	BCl3 valve closed
6/21/2010	1:25:26 PM	PH3 valve closed
6/21/2010	1:25:26 PM	SiCl4 pre valve closed
6/21/2010	1:25:26 PM	SiCl4 post valve closed
6/21/2010	1:25:26 PM	Main Vac valve closed
6/21/2010	1:25:26 PM	Bypass valve closed
6/21/2010	1:25:26 PM	Bubbler valve closed
6/21/2010	1:25:26 PM	Helium MFC set to  0.000000
6/21/2010	1:25:26 PM	H2 MFC set to  0.000000
6/21/2010	1:25:26 PM	BCl3 MFC set to  0.000000
6/21/2010	1:25:26 PM	PHl3 MFC set to  0.000000
6/21/2010	1:25:26 PM	SiCl4 MFC set to  0.000000
6/21/2010	1:25:26 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	1:25:27 PM	Tube furnace set to 0
6/21/2010	1:25:27 PM	Run finished at 1:25 PM
6/21/2010	1:25:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/21/2010	1:34:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	1:34:33 PM	Recipe started at 1:34 PM
6/21/2010	1:34:33 PM	Helium valve closed
6/21/2010	1:34:33 PM	H2 valve closed
6/21/2010	1:34:33 PM	BCl3 valve closed
6/21/2010	1:34:33 PM	PH3 valve closed
6/21/2010	1:34:33 PM	SiCl4 pre valve closed
6/21/2010	1:34:33 PM	SiCl4 post valve closed
6/21/2010	1:34:33 PM	Main Vac valve closed
6/21/2010	1:34:33 PM	Bubbler valve closed
6/21/2010	1:34:33 PM	Bypass valve opened
6/21/2010	1:34:33 PM	Helium MFC set to  0.000000
6/21/2010	1:34:33 PM	H2 MFC set to  0.000000
6/21/2010	1:34:33 PM	BCl3 MFC set to  0.000000
6/21/2010	1:34:33 PM	PHl3 MFC set to  0.000000
6/21/2010	1:34:33 PM	SiCl4 MFC set to  0.000000
6/21/2010	1:34:33 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	1:34:33 PM	Tube furnace set to 0
6/21/2010	1:35:22 PM	Helium valve closed
6/21/2010	1:35:22 PM	H2 valve closed
6/21/2010	1:35:22 PM	BCl3 valve closed
6/21/2010	1:35:22 PM	PH3 valve closed
6/21/2010	1:35:22 PM	SiCl4 pre valve closed
6/21/2010	1:35:22 PM	SiCl4 post valve closed
6/21/2010	1:35:22 PM	Bubbler valve closed
6/21/2010	1:35:22 PM	Main Vac valve opened
6/21/2010	1:35:22 PM	Bypass valve opened
6/21/2010	1:35:22 PM	Helium MFC set to  0.000000
6/21/2010	1:35:22 PM	H2 MFC set to  0.000000
6/21/2010	1:35:22 PM	BCl3 MFC set to  0.000000
6/21/2010	1:35:22 PM	PHl3 MFC set to  0.000000
6/21/2010	1:35:22 PM	SiCl4 MFC set to  0.000000
6/21/2010	1:35:22 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	1:35:22 PM	Tube furnace set to 0
6/21/2010	1:35:22 PM	Run finished at 1:35 PM
6/21/2010	1:35:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	1:36:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	1:36:17 PM	Recipe started at 1:36 PM
6/21/2010	1:36:17 PM	H2 valve closed
6/21/2010	1:36:17 PM	BCl3 valve closed
6/21/2010	1:36:17 PM	PH3 valve closed
6/21/2010	1:36:17 PM	SiCl4 pre valve closed
6/21/2010	1:36:17 PM	SiCl4 post valve closed
6/21/2010	1:36:17 PM	Main Vac valve closed
6/21/2010	1:36:17 PM	Bypass valve closed
6/21/2010	1:36:17 PM	Bubbler valve closed
6/21/2010	1:36:17 PM	Helium valve opened
6/21/2010	1:36:17 PM	Helium MFC set to  500.000000
6/21/2010	1:36:17 PM	H2 MFC set to  0.000000
6/21/2010	1:36:17 PM	BCl3 MFC set to  0.000000
6/21/2010	1:36:17 PM	PHl3 MFC set to  0.000000
6/21/2010	1:36:17 PM	SiCl4 MFC set to  0.000000
6/21/2010	1:36:17 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	1:36:17 PM	Tube furnace set to 0
6/21/2010	1:37:36 PM	Helium valve closed
6/21/2010	1:37:36 PM	H2 valve closed
6/21/2010	1:37:36 PM	BCl3 valve closed
6/21/2010	1:37:36 PM	PH3 valve closed
6/21/2010	1:37:36 PM	SiCl4 pre valve closed
6/21/2010	1:37:36 PM	SiCl4 post valve closed
6/21/2010	1:37:36 PM	Main Vac valve closed
6/21/2010	1:37:36 PM	Bypass valve closed
6/21/2010	1:37:36 PM	Bubbler valve closed
6/21/2010	1:37:36 PM	Helium MFC set to  0.000000
6/21/2010	1:37:36 PM	H2 MFC set to  0.000000
6/21/2010	1:37:36 PM	BCl3 MFC set to  0.000000
6/21/2010	1:37:36 PM	PHl3 MFC set to  0.000000
6/21/2010	1:37:36 PM	SiCl4 MFC set to  0.000000
6/21/2010	1:37:36 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	1:37:36 PM	Tube furnace set to 0
6/21/2010	1:37:37 PM	Run finished at 1:37 PM
6/21/2010	1:37:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	1:42:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	1:42:52 PM	Recipe started at 1:42 PM
6/21/2010	1:42:52 PM	Helium valve closed
6/21/2010	1:42:52 PM	H2 valve closed
6/21/2010	1:42:52 PM	BCl3 valve closed
6/21/2010	1:42:52 PM	PH3 valve closed
6/21/2010	1:42:52 PM	SiCl4 pre valve closed
6/21/2010	1:42:52 PM	SiCl4 post valve closed
6/21/2010	1:42:52 PM	Main Vac valve closed
6/21/2010	1:42:52 PM	Bubbler valve closed
6/21/2010	1:42:52 PM	Bypass valve opened
6/21/2010	1:42:52 PM	Helium MFC set to  0.000000
6/21/2010	1:42:52 PM	H2 MFC set to  0.000000
6/21/2010	1:42:52 PM	BCl3 MFC set to  0.000000
6/21/2010	1:42:52 PM	PHl3 MFC set to  0.000000
6/21/2010	1:42:52 PM	SiCl4 MFC set to  0.000000
6/21/2010	1:42:52 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	1:42:52 PM	Tube furnace set to 0
6/21/2010	1:43:39 PM	Helium valve closed
6/21/2010	1:43:39 PM	H2 valve closed
6/21/2010	1:43:39 PM	BCl3 valve closed
6/21/2010	1:43:39 PM	PH3 valve closed
6/21/2010	1:43:39 PM	SiCl4 pre valve closed
6/21/2010	1:43:39 PM	SiCl4 post valve closed
6/21/2010	1:43:39 PM	Bubbler valve closed
6/21/2010	1:43:39 PM	Main Vac valve opened
6/21/2010	1:43:39 PM	Bypass valve opened
6/21/2010	1:43:39 PM	Helium MFC set to  0.000000
6/21/2010	1:43:39 PM	H2 MFC set to  0.000000
6/21/2010	1:43:39 PM	BCl3 MFC set to  0.000000
6/21/2010	1:43:39 PM	PHl3 MFC set to  0.000000
6/21/2010	1:43:39 PM	SiCl4 MFC set to  0.000000
6/21/2010	1:43:39 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	1:43:39 PM	Tube furnace set to 0
6/21/2010	1:43:39 PM	Run finished at 1:43 PM
6/21/2010	1:43:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	1:46:30 PM	Helium MFC set to  100.000000
6/21/2010	1:46:31 PM	Helium valve opened
6/21/2010	1:46:37 PM	Helium MFC set to  500.000000
6/21/2010	2:14:53 PM	Helium MFC set to  500.000000
6/21/2010	2:14:54 PM	Helium valve closed
6/21/2010	2:14:58 PM	Helium MFC set to  0.000000
6/21/2010	2:15:41 PM	Helium MFC set to  100.000000
6/21/2010	2:15:42 PM	Helium valve opened
6/21/2010	2:15:46 PM	Helium MFC set to  500.000000
6/21/2010	2:21:07 PM	Helium valve closed
6/21/2010	2:21:10 PM	Helium MFC set to  0.000000
6/21/2010	2:21:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	2:21:20 PM	Recipe started at 2:21 PM
6/21/2010	2:21:20 PM	H2 valve closed
6/21/2010	2:21:20 PM	BCl3 valve closed
6/21/2010	2:21:20 PM	PH3 valve closed
6/21/2010	2:21:20 PM	SiCl4 pre valve closed
6/21/2010	2:21:20 PM	SiCl4 post valve closed
6/21/2010	2:21:20 PM	Main Vac valve closed
6/21/2010	2:21:20 PM	Bypass valve closed
6/21/2010	2:21:20 PM	Bubbler valve closed
6/21/2010	2:21:20 PM	Helium valve opened
6/21/2010	2:21:20 PM	Helium MFC set to  500.000000
6/21/2010	2:21:20 PM	H2 MFC set to  0.000000
6/21/2010	2:21:20 PM	BCl3 MFC set to  0.000000
6/21/2010	2:21:20 PM	PHl3 MFC set to  0.000000
6/21/2010	2:21:20 PM	SiCl4 MFC set to  0.000000
6/21/2010	2:21:20 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	2:21:20 PM	Tube furnace set to 0
6/21/2010	2:22:40 PM	Helium valve closed
6/21/2010	2:22:40 PM	H2 valve closed
6/21/2010	2:22:40 PM	BCl3 valve closed
6/21/2010	2:22:40 PM	PH3 valve closed
6/21/2010	2:22:40 PM	SiCl4 pre valve closed
6/21/2010	2:22:40 PM	SiCl4 post valve closed
6/21/2010	2:22:40 PM	Main Vac valve closed
6/21/2010	2:22:40 PM	Bypass valve closed
6/21/2010	2:22:40 PM	Bubbler valve closed
6/21/2010	2:22:40 PM	Helium MFC set to  0.000000
6/21/2010	2:22:40 PM	H2 MFC set to  0.000000
6/21/2010	2:22:40 PM	BCl3 MFC set to  0.000000
6/21/2010	2:22:40 PM	PHl3 MFC set to  0.000000
6/21/2010	2:22:40 PM	SiCl4 MFC set to  0.000000
6/21/2010	2:22:40 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	2:22:41 PM	Tube furnace set to 0
6/21/2010	2:22:41 PM	Run finished at 2:22 PM
6/21/2010	2:22:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	2:40:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	2:40:20 PM	Recipe started at 2:40 PM
6/21/2010	2:40:20 PM	Helium valve closed
6/21/2010	2:40:20 PM	H2 valve closed
6/21/2010	2:40:20 PM	BCl3 valve closed
6/21/2010	2:40:20 PM	PH3 valve closed
6/21/2010	2:40:20 PM	SiCl4 pre valve closed
6/21/2010	2:40:20 PM	SiCl4 post valve closed
6/21/2010	2:40:20 PM	Main Vac valve closed
6/21/2010	2:40:20 PM	Bubbler valve closed
6/21/2010	2:40:20 PM	Bypass valve opened
6/21/2010	2:40:20 PM	Helium MFC set to  0.000000
6/21/2010	2:40:20 PM	H2 MFC set to  0.000000
6/21/2010	2:40:20 PM	BCl3 MFC set to  0.000000
6/21/2010	2:40:20 PM	PHl3 MFC set to  0.000000
6/21/2010	2:40:20 PM	SiCl4 MFC set to  0.000000
6/21/2010	2:40:20 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	2:40:21 PM	Tube furnace set to 0
6/21/2010	2:41:09 PM	Helium valve closed
6/21/2010	2:41:09 PM	H2 valve closed
6/21/2010	2:41:09 PM	BCl3 valve closed
6/21/2010	2:41:09 PM	PH3 valve closed
6/21/2010	2:41:09 PM	SiCl4 pre valve closed
6/21/2010	2:41:09 PM	SiCl4 post valve closed
6/21/2010	2:41:09 PM	Bubbler valve closed
6/21/2010	2:41:09 PM	Main Vac valve opened
6/21/2010	2:41:09 PM	Bypass valve opened
6/21/2010	2:41:09 PM	Helium MFC set to  0.000000
6/21/2010	2:41:09 PM	H2 MFC set to  0.000000
6/21/2010	2:41:09 PM	BCl3 MFC set to  0.000000
6/21/2010	2:41:09 PM	PHl3 MFC set to  0.000000
6/21/2010	2:41:09 PM	SiCl4 MFC set to  0.000000
6/21/2010	2:41:09 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	2:41:09 PM	Tube furnace set to 0
6/21/2010	2:41:09 PM	Run finished at 2:41 PM
6/21/2010	2:41:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	2:41:46 PM	Helium MFC set to  100.000000
6/21/2010	2:41:48 PM	Helium valve opened
6/21/2010	2:41:51 PM	Helium MFC set to  500.000000
6/21/2010	2:45:31 PM	Helium valve closed
6/21/2010	2:45:35 PM	Helium MFC set to  0.000000
6/21/2010	2:46:07 PM	Helium MFC set to  100.000000
6/21/2010	2:46:09 PM	Helium valve opened
6/21/2010	2:46:14 PM	Helium MFC set to  500.000000
6/21/2010	2:53:30 PM	Helium valve closed
6/21/2010	2:54:05 PM	Helium MFC set to  100.000000
6/21/2010	2:54:07 PM	Helium valve opened
6/21/2010	2:54:12 PM	Helium MFC set to  500.000000
6/21/2010	3:11:09 PM	Helium valve closed
6/21/2010	3:11:11 PM	Helium MFC set to  0.000000
6/21/2010	3:12:14 PM	Helium MFC set to  100.000000
6/21/2010	3:12:18 PM	Helium valve opened
6/21/2010	3:12:23 PM	Helium MFC set to  500.000000
6/21/2010	3:15:07 PM	Helium valve closed
6/21/2010	3:15:10 PM	Helium MFC set to  0.000000
6/21/2010	3:19:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	3:19:06 PM	Recipe started at 3:19 PM
6/21/2010	3:19:06 PM	H2 valve closed
6/21/2010	3:19:06 PM	BCl3 valve closed
6/21/2010	3:19:06 PM	PH3 valve closed
6/21/2010	3:19:06 PM	SiCl4 pre valve closed
6/21/2010	3:19:06 PM	SiCl4 post valve closed
6/21/2010	3:19:06 PM	Main Vac valve closed
6/21/2010	3:19:06 PM	Bypass valve closed
6/21/2010	3:19:06 PM	Bubbler valve closed
6/21/2010	3:19:06 PM	Helium valve opened
6/21/2010	3:19:06 PM	Helium MFC set to  500.000000
6/21/2010	3:19:06 PM	H2 MFC set to  0.000000
6/21/2010	3:19:06 PM	BCl3 MFC set to  0.000000
6/21/2010	3:19:06 PM	PHl3 MFC set to  0.000000
6/21/2010	3:19:06 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:19:06 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:19:06 PM	Tube furnace set to 0
6/21/2010	3:20:27 PM	Helium valve closed
6/21/2010	3:20:27 PM	H2 valve closed
6/21/2010	3:20:27 PM	BCl3 valve closed
6/21/2010	3:20:27 PM	PH3 valve closed
6/21/2010	3:20:27 PM	SiCl4 pre valve closed
6/21/2010	3:20:27 PM	SiCl4 post valve closed
6/21/2010	3:20:27 PM	Main Vac valve closed
6/21/2010	3:20:27 PM	Bypass valve closed
6/21/2010	3:20:27 PM	Bubbler valve closed
6/21/2010	3:20:27 PM	Helium MFC set to  0.000000
6/21/2010	3:20:27 PM	H2 MFC set to  0.000000
6/21/2010	3:20:27 PM	BCl3 MFC set to  0.000000
6/21/2010	3:20:27 PM	PHl3 MFC set to  0.000000
6/21/2010	3:20:27 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:20:27 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:20:27 PM	Tube furnace set to 0
6/21/2010	3:20:27 PM	Run finished at 3:20 PM
6/21/2010	3:20:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	3:26:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	3:26:28 PM	Recipe started at 3:26 PM
6/21/2010	3:26:28 PM	Helium valve closed
6/21/2010	3:26:28 PM	H2 valve closed
6/21/2010	3:26:28 PM	BCl3 valve closed
6/21/2010	3:26:28 PM	PH3 valve closed
6/21/2010	3:26:28 PM	SiCl4 pre valve closed
6/21/2010	3:26:28 PM	SiCl4 post valve closed
6/21/2010	3:26:28 PM	Main Vac valve closed
6/21/2010	3:26:28 PM	Bubbler valve closed
6/21/2010	3:26:28 PM	Bypass valve opened
6/21/2010	3:26:28 PM	Helium MFC set to  0.000000
6/21/2010	3:26:28 PM	H2 MFC set to  0.000000
6/21/2010	3:26:28 PM	BCl3 MFC set to  0.000000
6/21/2010	3:26:28 PM	PHl3 MFC set to  0.000000
6/21/2010	3:26:28 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:26:28 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:26:28 PM	Tube furnace set to 0
6/21/2010	3:27:16 PM	Helium valve closed
6/21/2010	3:27:16 PM	H2 valve closed
6/21/2010	3:27:16 PM	BCl3 valve closed
6/21/2010	3:27:16 PM	PH3 valve closed
6/21/2010	3:27:16 PM	SiCl4 pre valve closed
6/21/2010	3:27:16 PM	SiCl4 post valve closed
6/21/2010	3:27:16 PM	Bubbler valve closed
6/21/2010	3:27:16 PM	Main Vac valve opened
6/21/2010	3:27:16 PM	Bypass valve opened
6/21/2010	3:27:16 PM	Helium MFC set to  0.000000
6/21/2010	3:27:16 PM	H2 MFC set to  0.000000
6/21/2010	3:27:16 PM	BCl3 MFC set to  0.000000
6/21/2010	3:27:16 PM	PHl3 MFC set to  0.000000
6/21/2010	3:27:16 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:27:16 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:27:16 PM	Tube furnace set to 0
6/21/2010	3:27:16 PM	Run finished at 3:27 PM
6/21/2010	3:27:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	3:27:44 PM	Helium MFC set to  100.000000
6/21/2010	3:27:45 PM	Helium valve opened
6/21/2010	3:27:49 PM	Helium MFC set to  500.000000
6/21/2010	3:31:01 PM	Helium valve closed
6/21/2010	3:31:27 PM	Helium valve opened
6/21/2010	3:34:01 PM	Helium valve closed
6/21/2010	3:34:25 PM	Helium valve opened
6/21/2010	3:37:38 PM	Helium valve closed
6/21/2010	3:38:13 PM	Helium valve opened
6/21/2010	3:43:44 PM	Helium valve closed
6/21/2010	3:43:53 PM	Helium MFC set to  0.000000
6/21/2010	3:44:30 PM	Helium valve opened
6/21/2010	3:44:51 PM	Helium valve closed
6/21/2010	3:44:54 PM	Helium MFC set to  100.000000
6/21/2010	3:44:57 PM	Helium MFC set to  100.000000
6/21/2010	3:44:57 PM	Helium valve opened
6/21/2010	3:45:01 PM	Helium MFC set to  500.000000
6/21/2010	3:45:29 PM	Helium MFC set to  500.000000
6/21/2010	3:45:30 PM	Helium valve closed
6/21/2010	3:45:32 PM	Helium MFC set to  0.000000
6/21/2010	3:45:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/21/2010	3:45:41 PM	Recipe started at 3:45 PM
6/21/2010	3:45:41 PM	H2 valve closed
6/21/2010	3:45:41 PM	BCl3 valve closed
6/21/2010	3:45:41 PM	PH3 valve closed
6/21/2010	3:45:41 PM	SiCl4 pre valve closed
6/21/2010	3:45:41 PM	SiCl4 post valve closed
6/21/2010	3:45:41 PM	Main Vac valve closed
6/21/2010	3:45:41 PM	Bypass valve closed
6/21/2010	3:45:41 PM	Bubbler valve closed
6/21/2010	3:45:41 PM	Helium valve opened
6/21/2010	3:45:41 PM	Helium MFC set to  500.000000
6/21/2010	3:45:41 PM	H2 MFC set to  0.000000
6/21/2010	3:45:41 PM	BCl3 MFC set to  0.000000
6/21/2010	3:45:41 PM	PHl3 MFC set to  0.000000
6/21/2010	3:45:41 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:45:41 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:45:41 PM	Tube furnace set to 0
6/21/2010	3:47:04 PM	Helium valve closed
6/21/2010	3:47:04 PM	H2 valve closed
6/21/2010	3:47:04 PM	BCl3 valve closed
6/21/2010	3:47:04 PM	PH3 valve closed
6/21/2010	3:47:04 PM	SiCl4 pre valve closed
6/21/2010	3:47:04 PM	SiCl4 post valve closed
6/21/2010	3:47:04 PM	Main Vac valve closed
6/21/2010	3:47:04 PM	Bypass valve closed
6/21/2010	3:47:04 PM	Bubbler valve closed
6/21/2010	3:47:04 PM	Helium MFC set to  0.000000
6/21/2010	3:47:04 PM	H2 MFC set to  0.000000
6/21/2010	3:47:04 PM	BCl3 MFC set to  0.000000
6/21/2010	3:47:04 PM	PHl3 MFC set to  0.000000
6/21/2010	3:47:04 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:47:04 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:47:04 PM	Tube furnace set to 0
6/21/2010	3:47:19 PM	Helium valve closed
6/21/2010	3:47:19 PM	H2 valve closed
6/21/2010	3:47:19 PM	BCl3 valve closed
6/21/2010	3:47:19 PM	PH3 valve closed
6/21/2010	3:47:19 PM	SiCl4 pre valve closed
6/21/2010	3:47:19 PM	SiCl4 post valve closed
6/21/2010	3:47:19 PM	Main Vac valve closed
6/21/2010	3:47:19 PM	Bubbler valve closed
6/21/2010	3:47:19 PM	Bypass valve opened
6/21/2010	3:47:19 PM	Helium MFC set to  0.000000
6/21/2010	3:47:19 PM	H2 MFC set to  0.000000
6/21/2010	3:47:19 PM	BCl3 MFC set to  0.000000
6/21/2010	3:47:19 PM	PHl3 MFC set to  0.000000
6/21/2010	3:47:19 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:47:19 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:47:19 PM	Tube furnace set to 0
6/21/2010	3:47:53 PM	Helium valve closed
6/21/2010	3:47:53 PM	H2 valve closed
6/21/2010	3:47:53 PM	BCl3 valve closed
6/21/2010	3:47:53 PM	PH3 valve closed
6/21/2010	3:47:53 PM	SiCl4 pre valve closed
6/21/2010	3:47:53 PM	SiCl4 post valve closed
6/21/2010	3:47:53 PM	Bubbler valve closed
6/21/2010	3:47:53 PM	Main Vac valve opened
6/21/2010	3:47:53 PM	Bypass valve opened
6/21/2010	3:47:53 PM	Helium MFC set to  0.000000
6/21/2010	3:47:53 PM	H2 MFC set to  0.000000
6/21/2010	3:47:53 PM	BCl3 MFC set to  0.000000
6/21/2010	3:47:53 PM	PHl3 MFC set to  0.000000
6/21/2010	3:47:53 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:47:53 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:47:53 PM	Tube furnace set to 0
6/21/2010	3:51:41 PM	H2 valve closed
6/21/2010	3:51:41 PM	BCl3 valve closed
6/21/2010	3:51:41 PM	PH3 valve closed
6/21/2010	3:51:41 PM	SiCl4 pre valve closed
6/21/2010	3:51:41 PM	SiCl4 post valve closed
6/21/2010	3:51:41 PM	Main Vac valve closed
6/21/2010	3:51:41 PM	Bypass valve closed
6/21/2010	3:51:41 PM	Bubbler valve closed
6/21/2010	3:51:41 PM	Helium valve opened
6/21/2010	3:51:41 PM	Helium MFC set to  500.000000
6/21/2010	3:51:41 PM	H2 MFC set to  0.000000
6/21/2010	3:51:41 PM	BCl3 MFC set to  0.000000
6/21/2010	3:51:41 PM	PHl3 MFC set to  0.000000
6/21/2010	3:51:41 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:51:41 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:51:41 PM	Tube furnace set to 0
6/21/2010	3:53:04 PM	Helium valve closed
6/21/2010	3:53:04 PM	H2 valve closed
6/21/2010	3:53:04 PM	BCl3 valve closed
6/21/2010	3:53:04 PM	PH3 valve closed
6/21/2010	3:53:04 PM	SiCl4 pre valve closed
6/21/2010	3:53:04 PM	SiCl4 post valve closed
6/21/2010	3:53:04 PM	Main Vac valve closed
6/21/2010	3:53:04 PM	Bypass valve closed
6/21/2010	3:53:04 PM	Bubbler valve closed
6/21/2010	3:53:04 PM	Helium MFC set to  0.000000
6/21/2010	3:53:04 PM	H2 MFC set to  0.000000
6/21/2010	3:53:04 PM	BCl3 MFC set to  0.000000
6/21/2010	3:53:04 PM	PHl3 MFC set to  0.000000
6/21/2010	3:53:04 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:53:04 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:53:04 PM	Tube furnace set to 0
6/21/2010	3:53:19 PM	Helium valve closed
6/21/2010	3:53:19 PM	H2 valve closed
6/21/2010	3:53:19 PM	BCl3 valve closed
6/21/2010	3:53:19 PM	PH3 valve closed
6/21/2010	3:53:19 PM	SiCl4 pre valve closed
6/21/2010	3:53:19 PM	SiCl4 post valve closed
6/21/2010	3:53:19 PM	Main Vac valve closed
6/21/2010	3:53:19 PM	Bubbler valve closed
6/21/2010	3:53:19 PM	Bypass valve opened
6/21/2010	3:53:19 PM	Helium MFC set to  0.000000
6/21/2010	3:53:19 PM	H2 MFC set to  0.000000
6/21/2010	3:53:19 PM	BCl3 MFC set to  0.000000
6/21/2010	3:53:19 PM	PHl3 MFC set to  0.000000
6/21/2010	3:53:19 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:53:19 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:53:19 PM	Tube furnace set to 0
6/21/2010	3:53:53 PM	Helium valve closed
6/21/2010	3:53:53 PM	H2 valve closed
6/21/2010	3:53:53 PM	BCl3 valve closed
6/21/2010	3:53:53 PM	PH3 valve closed
6/21/2010	3:53:53 PM	SiCl4 pre valve closed
6/21/2010	3:53:53 PM	SiCl4 post valve closed
6/21/2010	3:53:53 PM	Bubbler valve closed
6/21/2010	3:53:53 PM	Main Vac valve opened
6/21/2010	3:53:53 PM	Bypass valve opened
6/21/2010	3:53:53 PM	Helium MFC set to  0.000000
6/21/2010	3:53:53 PM	H2 MFC set to  0.000000
6/21/2010	3:53:53 PM	BCl3 MFC set to  0.000000
6/21/2010	3:53:53 PM	PHl3 MFC set to  0.000000
6/21/2010	3:53:53 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:53:53 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:53:53 PM	Tube furnace set to 0
6/21/2010	3:54:18 PM	Run aborted at 3:54 PM
6/21/2010	3:54:18 PM	Helium valve closed
6/21/2010	3:54:18 PM	H2 valve closed
6/21/2010	3:54:18 PM	BCl3 valve closed
6/21/2010	3:54:18 PM	PH3 valve closed
6/21/2010	3:54:18 PM	SiCl4 pre valve closed
6/21/2010	3:54:18 PM	SiCl4 post valve closed
6/21/2010	3:54:18 PM	Bypass valve closed
6/21/2010	3:54:18 PM	Main Vac valve closed
6/21/2010	3:54:18 PM	Bubbler valve closed
6/21/2010	3:54:18 PM	Helium MFC set to  0.000000
6/21/2010	3:54:18 PM	H2 MFC set to  0.000000
6/21/2010	3:54:18 PM	BCl3 MFC set to  0.000000
6/21/2010	3:54:18 PM	PHl3 MFC set to  0.000000
6/21/2010	3:54:18 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:54:18 PM	Tube furnace set to 0
6/21/2010	3:54:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/21/2010	3:54:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	3:54:22 PM	Recipe started at 3:54 PM
6/21/2010	3:54:22 PM	Helium valve closed
6/21/2010	3:54:22 PM	H2 valve closed
6/21/2010	3:54:22 PM	BCl3 valve closed
6/21/2010	3:54:22 PM	PH3 valve closed
6/21/2010	3:54:22 PM	SiCl4 pre valve closed
6/21/2010	3:54:22 PM	SiCl4 post valve closed
6/21/2010	3:54:22 PM	Main Vac valve closed
6/21/2010	3:54:22 PM	Bubbler valve closed
6/21/2010	3:54:22 PM	Bypass valve opened
6/21/2010	3:54:22 PM	Helium MFC set to  0.000000
6/21/2010	3:54:22 PM	H2 MFC set to  0.000000
6/21/2010	3:54:22 PM	BCl3 MFC set to  0.000000
6/21/2010	3:54:22 PM	PHl3 MFC set to  0.000000
6/21/2010	3:54:22 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:54:22 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:54:22 PM	Tube furnace set to 0
6/21/2010	3:54:22 PM	Helium valve closed
6/21/2010	3:54:22 PM	H2 valve closed
6/21/2010	3:54:22 PM	BCl3 valve closed
6/21/2010	3:54:22 PM	PH3 valve closed
6/21/2010	3:54:22 PM	SiCl4 pre valve closed
6/21/2010	3:54:22 PM	SiCl4 post valve closed
6/21/2010	3:54:22 PM	Bubbler valve closed
6/21/2010	3:54:22 PM	Main Vac valve opened
6/21/2010	3:54:23 PM	Bypass valve opened
6/21/2010	3:54:23 PM	Helium MFC set to  0.000000
6/21/2010	3:54:23 PM	H2 MFC set to  0.000000
6/21/2010	3:54:23 PM	BCl3 MFC set to  0.000000
6/21/2010	3:54:23 PM	PHl3 MFC set to  0.000000
6/21/2010	3:54:23 PM	SiCl4 MFC set to  0.000000
6/21/2010	3:54:23 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	3:54:23 PM	Tube furnace set to 0
6/21/2010	3:54:23 PM	Run finished at 3:54 PM
6/21/2010	3:54:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	3:54:41 PM	Helium MFC set to  100.000000
6/21/2010	3:54:42 PM	Helium valve opened
6/21/2010	3:54:46 PM	Helium MFC set to  500.000000
6/21/2010	4:02:55 PM	Helium valve closed
6/21/2010	4:04:22 PM	Helium valve opened
6/21/2010	4:07:01 PM	Helium valve closed
6/21/2010	4:07:04 PM	Helium MFC set to  0.000000
6/21/2010	4:08:48 PM	Recipe started at 4:08 PM
6/21/2010	4:08:48 PM	Helium valve closed
6/21/2010	4:08:48 PM	BCl3 valve closed
6/21/2010	4:08:48 PM	PH3 valve closed
6/21/2010	4:08:48 PM	SiCl4 pre valve closed
6/21/2010	4:08:48 PM	SiCl4 post valve closed
6/21/2010	4:08:48 PM	Main Vac valve closed
6/21/2010	4:08:48 PM	Bypass valve closed
6/21/2010	4:08:48 PM	Bubbler valve closed
6/21/2010	4:08:48 PM	H2 valve opened
6/21/2010	4:08:48 PM	Helium MFC set to  0.000000
6/21/2010	4:08:48 PM	H2 MFC set to  500.000000
6/21/2010	4:08:48 PM	BCl3 MFC set to  0.000000
6/21/2010	4:08:48 PM	PHl3 MFC set to  0.000000
6/21/2010	4:08:48 PM	SiCl4 MFC set to  0.000000
6/21/2010	4:08:48 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	4:08:49 PM	Tube furnace set to 1000
6/21/2010	4:10:08 PM	Helium valve closed
6/21/2010	4:10:08 PM	BCl3 valve closed
6/21/2010	4:10:08 PM	PH3 valve closed
6/21/2010	4:10:08 PM	SiCl4 pre valve closed
6/21/2010	4:10:08 PM	SiCl4 post valve closed
6/21/2010	4:10:08 PM	Main Vac valve closed
6/21/2010	4:10:08 PM	Bypass valve closed
6/21/2010	4:10:08 PM	H2 valve opened
6/21/2010	4:10:08 PM	Bubbler valve opened
6/21/2010	4:10:08 PM	Helium MFC set to  0.000000
6/21/2010	4:10:08 PM	H2 MFC set to  500.000000
6/21/2010	4:10:08 PM	BCl3 MFC set to  0.000000
6/21/2010	4:10:08 PM	PHl3 MFC set to  0.000000
6/21/2010	4:10:08 PM	SiCl4 MFC set to  0.000000
6/21/2010	4:10:08 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	4:10:09 PM	Tube furnace set to 1000
6/21/2010	4:30:08 PM	Helium valve closed
6/21/2010	4:30:08 PM	PH3 valve closed
6/21/2010	4:30:08 PM	Main Vac valve closed
6/21/2010	4:30:08 PM	Bypass valve closed
6/21/2010	4:30:08 PM	H2 valve opened
6/21/2010	4:30:08 PM	BCl3 valve opened
6/21/2010	4:30:08 PM	SiCl4 pre valve opened
6/21/2010	4:30:08 PM	SiCl4 post valve opened
6/21/2010	4:30:09 PM	Bubbler valve opened
6/21/2010	4:30:09 PM	Helium MFC set to  0.000000
6/21/2010	4:30:09 PM	H2 MFC set to  500.000000
6/21/2010	4:30:09 PM	BCl3 MFC set to  35.000000
6/21/2010	4:30:09 PM	PHl3 MFC set to  0.000000
6/21/2010	4:30:09 PM	SiCl4 MFC set to  50.000000
6/21/2010	4:30:09 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	4:30:09 PM	Tube furnace set to 1000
6/21/2010	4:45:09 PM	Helium valve closed
6/21/2010	4:45:09 PM	BCl3 valve closed
6/21/2010	4:45:09 PM	PH3 valve closed
6/21/2010	4:45:09 PM	SiCl4 pre valve closed
6/21/2010	4:45:09 PM	SiCl4 post valve closed
6/21/2010	4:45:09 PM	Main Vac valve closed
6/21/2010	4:45:09 PM	Bypass valve closed
6/21/2010	4:45:09 PM	H2 valve opened
6/21/2010	4:45:09 PM	Bubbler valve opened
6/21/2010	4:45:09 PM	Helium MFC set to  0.000000
6/21/2010	4:45:09 PM	H2 MFC set to  500.000000
6/21/2010	4:45:09 PM	BCl3 MFC set to  0.000000
6/21/2010	4:45:09 PM	PHl3 MFC set to  0.000000
6/21/2010	4:45:09 PM	SiCl4 MFC set to  0.000000
6/21/2010	4:45:09 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	4:45:09 PM	Tube furnace set to 750
6/21/2010	5:05:09 PM	H2 valve closed
6/21/2010	5:05:09 PM	BCl3 valve closed
6/21/2010	5:05:09 PM	PH3 valve closed
6/21/2010	5:05:09 PM	SiCl4 pre valve closed
6/21/2010	5:05:09 PM	SiCl4 post valve closed
6/21/2010	5:05:09 PM	Main Vac valve closed
6/21/2010	5:05:09 PM	Bypass valve closed
6/21/2010	5:05:09 PM	Helium valve opened
6/21/2010	5:05:09 PM	Bubbler valve opened
6/21/2010	5:05:09 PM	Helium MFC set to  500.000000
6/21/2010	5:05:09 PM	H2 MFC set to  0.000000
6/21/2010	5:05:09 PM	BCl3 MFC set to  0.000000
6/21/2010	5:05:09 PM	PHl3 MFC set to  0.000000
6/21/2010	5:05:09 PM	SiCl4 MFC set to  0.000000
6/21/2010	5:05:09 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	5:05:09 PM	Tube furnace set to 0
6/21/2010	5:13:53 PM	Run aborted at 5:13 PM
6/21/2010	5:13:53 PM	Helium valve closed
6/21/2010	5:13:53 PM	H2 valve closed
6/21/2010	5:13:53 PM	BCl3 valve closed
6/21/2010	5:13:53 PM	PH3 valve closed
6/21/2010	5:13:53 PM	SiCl4 pre valve closed
6/21/2010	5:13:53 PM	SiCl4 post valve closed
6/21/2010	5:13:53 PM	Bypass valve closed
6/21/2010	5:13:53 PM	Main Vac valve closed
6/21/2010	5:13:53 PM	Bubbler valve closed
6/21/2010	5:13:53 PM	Helium MFC set to  0.000000
6/21/2010	5:13:53 PM	H2 MFC set to  0.000000
6/21/2010	5:13:53 PM	BCl3 MFC set to  0.000000
6/21/2010	5:13:53 PM	PHl3 MFC set to  0.000000
6/21/2010	5:13:53 PM	SiCl4 MFC set to  0.000000
6/21/2010	5:13:54 PM	Tube furnace set to 0
6/21/2010	5:20:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	5:20:56 PM	Recipe started at 5:20 PM
6/21/2010	5:20:56 PM	Helium valve closed
6/21/2010	5:20:56 PM	H2 valve closed
6/21/2010	5:20:56 PM	BCl3 valve closed
6/21/2010	5:20:56 PM	PH3 valve closed
6/21/2010	5:20:56 PM	SiCl4 pre valve closed
6/21/2010	5:20:56 PM	SiCl4 post valve closed
6/21/2010	5:20:56 PM	Main Vac valve closed
6/21/2010	5:20:56 PM	Bubbler valve closed
6/21/2010	5:20:56 PM	Bypass valve opened
6/21/2010	5:20:56 PM	Helium MFC set to  0.000000
6/21/2010	5:20:56 PM	H2 MFC set to  0.000000
6/21/2010	5:20:56 PM	BCl3 MFC set to  0.000000
6/21/2010	5:20:56 PM	PHl3 MFC set to  0.000000
6/21/2010	5:20:56 PM	SiCl4 MFC set to  0.000000
6/21/2010	5:20:56 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	5:20:56 PM	Tube furnace set to 0
6/21/2010	5:21:43 PM	Helium valve closed
6/21/2010	5:21:43 PM	H2 valve closed
6/21/2010	5:21:43 PM	BCl3 valve closed
6/21/2010	5:21:43 PM	PH3 valve closed
6/21/2010	5:21:43 PM	SiCl4 pre valve closed
6/21/2010	5:21:43 PM	SiCl4 post valve closed
6/21/2010	5:21:43 PM	Bubbler valve closed
6/21/2010	5:21:43 PM	Main Vac valve opened
6/21/2010	5:21:43 PM	Bypass valve opened
6/21/2010	5:21:43 PM	Helium MFC set to  0.000000
6/21/2010	5:21:43 PM	H2 MFC set to  0.000000
6/21/2010	5:21:43 PM	BCl3 MFC set to  0.000000
6/21/2010	5:21:43 PM	PHl3 MFC set to  0.000000
6/21/2010	5:21:43 PM	SiCl4 MFC set to  0.000000
6/21/2010	5:21:43 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	5:21:43 PM	Tube furnace set to 0
6/21/2010	5:21:43 PM	Run finished at 5:21 PM
6/21/2010	5:21:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	5:28:40 PM	Helium MFC set to  100.000000
6/21/2010	5:28:42 PM	Helium valve opened
6/21/2010	5:28:45 PM	Helium MFC set to  500.000000
6/21/2010	5:33:31 PM	Helium valve closed
6/21/2010	5:34:02 PM	Helium valve opened
6/21/2010	5:36:44 PM	Helium valve closed
6/21/2010	5:37:27 PM	Helium valve opened
6/21/2010	5:43:36 PM	Helium valve closed
6/21/2010	5:44:22 PM	Helium valve opened
6/21/2010	5:45:01 PM	Helium valve closed
6/21/2010	5:45:51 PM	Helium MFC set to  100.000000
6/21/2010	5:45:53 PM	Helium valve opened
6/21/2010	5:45:56 PM	Helium MFC set to  500.000000
6/21/2010	5:46:44 PM	Helium valve closed
6/21/2010	5:48:30 PM	Helium valve opened
6/21/2010	5:49:34 PM	Helium valve closed
6/21/2010	5:50:27 PM	Helium valve opened
6/21/2010	5:51:12 PM	Helium valve closed
6/21/2010	5:52:37 PM	Recipe started at 5:52 PM
6/21/2010	5:52:37 PM	Helium valve closed
6/21/2010	5:52:37 PM	BCl3 valve closed
6/21/2010	5:52:37 PM	PH3 valve closed
6/21/2010	5:52:37 PM	SiCl4 pre valve closed
6/21/2010	5:52:37 PM	SiCl4 post valve closed
6/21/2010	5:52:37 PM	Main Vac valve closed
6/21/2010	5:52:37 PM	Bypass valve closed
6/21/2010	5:52:37 PM	Bubbler valve closed
6/21/2010	5:52:37 PM	H2 valve opened
6/21/2010	5:52:37 PM	Helium MFC set to  0.000000
6/21/2010	5:52:37 PM	H2 MFC set to  500.000000
6/21/2010	5:52:37 PM	BCl3 MFC set to  0.000000
6/21/2010	5:52:37 PM	PHl3 MFC set to  0.000000
6/21/2010	5:52:37 PM	SiCl4 MFC set to  0.000000
6/21/2010	5:52:37 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	5:52:37 PM	Tube furnace set to 1000
6/21/2010	5:53:57 PM	Helium valve closed
6/21/2010	5:53:57 PM	BCl3 valve closed
6/21/2010	5:53:57 PM	PH3 valve closed
6/21/2010	5:53:57 PM	SiCl4 pre valve closed
6/21/2010	5:53:57 PM	SiCl4 post valve closed
6/21/2010	5:53:57 PM	Main Vac valve closed
6/21/2010	5:53:57 PM	Bypass valve closed
6/21/2010	5:53:57 PM	H2 valve opened
6/21/2010	5:53:57 PM	Bubbler valve opened
6/21/2010	5:53:57 PM	Helium MFC set to  0.000000
6/21/2010	5:53:57 PM	H2 MFC set to  500.000000
6/21/2010	5:53:57 PM	BCl3 MFC set to  0.000000
6/21/2010	5:53:57 PM	PHl3 MFC set to  0.000000
6/21/2010	5:53:57 PM	SiCl4 MFC set to  0.000000
6/21/2010	5:53:57 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	5:53:57 PM	Tube furnace set to 1000
6/21/2010	6:13:57 PM	Helium valve closed
6/21/2010	6:13:57 PM	PH3 valve closed
6/21/2010	6:13:57 PM	Main Vac valve closed
6/21/2010	6:13:57 PM	Bypass valve closed
6/21/2010	6:13:57 PM	H2 valve opened
6/21/2010	6:13:57 PM	BCl3 valve opened
6/21/2010	6:13:57 PM	SiCl4 pre valve opened
6/21/2010	6:13:57 PM	SiCl4 post valve opened
6/21/2010	6:13:57 PM	Bubbler valve opened
6/21/2010	6:13:57 PM	Helium MFC set to  0.000000
6/21/2010	6:13:57 PM	H2 MFC set to  500.000000
6/21/2010	6:13:57 PM	BCl3 MFC set to  35.000000
6/21/2010	6:13:57 PM	PHl3 MFC set to  0.000000
6/21/2010	6:13:57 PM	SiCl4 MFC set to  50.000000
6/21/2010	6:13:57 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	6:13:57 PM	Tube furnace set to 1000
6/21/2010	6:18:57 PM	Helium valve closed
6/21/2010	6:18:57 PM	BCl3 valve closed
6/21/2010	6:18:57 PM	PH3 valve closed
6/21/2010	6:18:57 PM	SiCl4 pre valve closed
6/21/2010	6:18:57 PM	SiCl4 post valve closed
6/21/2010	6:18:57 PM	Main Vac valve closed
6/21/2010	6:18:57 PM	Bypass valve closed
6/21/2010	6:18:57 PM	H2 valve opened
6/21/2010	6:18:57 PM	Bubbler valve opened
6/21/2010	6:18:57 PM	Helium MFC set to  0.000000
6/21/2010	6:18:57 PM	H2 MFC set to  500.000000
6/21/2010	6:18:57 PM	BCl3 MFC set to  0.000000
6/21/2010	6:18:57 PM	PHl3 MFC set to  0.000000
6/21/2010	6:18:57 PM	SiCl4 MFC set to  0.000000
6/21/2010	6:18:57 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	6:18:58 PM	Tube furnace set to 750
6/21/2010	6:38:58 PM	H2 valve closed
6/21/2010	6:38:58 PM	BCl3 valve closed
6/21/2010	6:38:58 PM	PH3 valve closed
6/21/2010	6:38:58 PM	SiCl4 pre valve closed
6/21/2010	6:38:58 PM	SiCl4 post valve closed
6/21/2010	6:38:58 PM	Main Vac valve closed
6/21/2010	6:38:58 PM	Bypass valve closed
6/21/2010	6:38:58 PM	Helium valve opened
6/21/2010	6:38:58 PM	Bubbler valve opened
6/21/2010	6:38:58 PM	Helium MFC set to  500.000000
6/21/2010	6:38:58 PM	H2 MFC set to  0.000000
6/21/2010	6:38:58 PM	BCl3 MFC set to  0.000000
6/21/2010	6:38:58 PM	PHl3 MFC set to  0.000000
6/21/2010	6:38:58 PM	SiCl4 MFC set to  0.000000
6/21/2010	6:38:58 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	6:38:58 PM	Tube furnace set to 0
6/21/2010	6:58:58 PM	Helium valve closed
6/21/2010	6:58:58 PM	H2 valve closed
6/21/2010	6:58:58 PM	BCl3 valve closed
6/21/2010	6:58:58 PM	PH3 valve closed
6/21/2010	6:58:58 PM	SiCl4 pre valve closed
6/21/2010	6:58:58 PM	SiCl4 post valve closed
6/21/2010	6:58:58 PM	Main Vac valve closed
6/21/2010	6:58:58 PM	Bypass valve closed
6/21/2010	6:58:58 PM	Bubbler valve closed
6/21/2010	6:58:58 PM	Helium MFC set to  0.000000
6/21/2010	6:58:58 PM	H2 MFC set to  0.000000
6/21/2010	6:58:58 PM	BCl3 MFC set to  0.000000
6/21/2010	6:58:58 PM	PHl3 MFC set to  0.000000
6/21/2010	6:58:58 PM	SiCl4 MFC set to  0.000000
6/21/2010	6:58:58 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	6:58:58 PM	Tube furnace set to 0
6/21/2010	6:58:58 PM	Run finished at 6:58 PM
6/21/2010	7:08:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	7:08:09 PM	Recipe started at 7:08 PM
6/21/2010	7:08:09 PM	H2 valve closed
6/21/2010	7:08:09 PM	BCl3 valve closed
6/21/2010	7:08:09 PM	PH3 valve closed
6/21/2010	7:08:09 PM	SiCl4 pre valve closed
6/21/2010	7:08:09 PM	SiCl4 post valve closed
6/21/2010	7:08:09 PM	Main Vac valve closed
6/21/2010	7:08:09 PM	Bypass valve closed
6/21/2010	7:08:09 PM	Bubbler valve closed
6/21/2010	7:08:09 PM	Helium valve opened
6/21/2010	7:08:09 PM	Helium MFC set to  500.000000
6/21/2010	7:08:09 PM	H2 MFC set to  0.000000
6/21/2010	7:08:09 PM	BCl3 MFC set to  0.000000
6/21/2010	7:08:09 PM	PHl3 MFC set to  0.000000
6/21/2010	7:08:09 PM	SiCl4 MFC set to  0.000000
6/21/2010	7:08:09 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	7:08:09 PM	Tube furnace set to 0
6/21/2010	7:08:13 PM	Helium valve closed
6/21/2010	7:08:13 PM	H2 valve closed
6/21/2010	7:08:13 PM	BCl3 valve closed
6/21/2010	7:08:13 PM	PH3 valve closed
6/21/2010	7:08:13 PM	SiCl4 pre valve closed
6/21/2010	7:08:13 PM	SiCl4 post valve closed
6/21/2010	7:08:13 PM	Main Vac valve closed
6/21/2010	7:08:13 PM	Bypass valve closed
6/21/2010	7:08:13 PM	Bubbler valve closed
6/21/2010	7:08:13 PM	Helium MFC set to  0.000000
6/21/2010	7:08:13 PM	H2 MFC set to  0.000000
6/21/2010	7:08:13 PM	BCl3 MFC set to  0.000000
6/21/2010	7:08:13 PM	PHl3 MFC set to  0.000000
6/21/2010	7:08:13 PM	SiCl4 MFC set to  0.000000
6/21/2010	7:08:13 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	7:08:13 PM	Tube furnace set to 0
6/21/2010	7:08:13 PM	Run finished at 7:08 PM
6/21/2010	7:08:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	7:09:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	7:09:18 PM	Recipe started at 7:09 PM
6/21/2010	7:09:18 PM	H2 valve closed
6/21/2010	7:09:18 PM	BCl3 valve closed
6/21/2010	7:09:18 PM	PH3 valve closed
6/21/2010	7:09:18 PM	SiCl4 pre valve closed
6/21/2010	7:09:18 PM	SiCl4 post valve closed
6/21/2010	7:09:18 PM	Main Vac valve closed
6/21/2010	7:09:18 PM	Bypass valve closed
6/21/2010	7:09:18 PM	Bubbler valve closed
6/21/2010	7:09:18 PM	Helium valve opened
6/21/2010	7:09:18 PM	Helium MFC set to  500.000000
6/21/2010	7:09:18 PM	H2 MFC set to  0.000000
6/21/2010	7:09:18 PM	BCl3 MFC set to  0.000000
6/21/2010	7:09:18 PM	PHl3 MFC set to  0.000000
6/21/2010	7:09:18 PM	SiCl4 MFC set to  0.000000
6/21/2010	7:09:18 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	7:09:18 PM	Tube furnace set to 0
6/21/2010	7:09:18 PM	Helium valve closed
6/21/2010	7:09:18 PM	H2 valve closed
6/21/2010	7:09:18 PM	BCl3 valve closed
6/21/2010	7:09:18 PM	PH3 valve closed
6/21/2010	7:09:18 PM	SiCl4 pre valve closed
6/21/2010	7:09:18 PM	SiCl4 post valve closed
6/21/2010	7:09:18 PM	Main Vac valve closed
6/21/2010	7:09:18 PM	Bypass valve closed
6/21/2010	7:09:18 PM	Bubbler valve closed
6/21/2010	7:09:18 PM	Helium MFC set to  0.000000
6/21/2010	7:09:18 PM	H2 MFC set to  0.000000
6/21/2010	7:09:18 PM	BCl3 MFC set to  0.000000
6/21/2010	7:09:18 PM	PHl3 MFC set to  0.000000
6/21/2010	7:09:18 PM	SiCl4 MFC set to  0.000000
6/21/2010	7:09:18 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	7:09:19 PM	Tube furnace set to 0
6/21/2010	7:09:19 PM	Run finished at 7:09 PM
6/21/2010	7:09:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	7:14:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	7:14:26 PM	Recipe started at 7:14 PM
6/21/2010	7:14:26 PM	H2 valve closed
6/21/2010	7:14:26 PM	BCl3 valve closed
6/21/2010	7:14:26 PM	PH3 valve closed
6/21/2010	7:14:26 PM	SiCl4 pre valve closed
6/21/2010	7:14:26 PM	SiCl4 post valve closed
6/21/2010	7:14:26 PM	Main Vac valve closed
6/21/2010	7:14:26 PM	Bypass valve closed
6/21/2010	7:14:26 PM	Bubbler valve closed
6/21/2010	7:14:26 PM	Helium valve opened
6/21/2010	7:14:26 PM	Helium MFC set to  500.000000
6/21/2010	7:14:26 PM	H2 MFC set to  0.000000
6/21/2010	7:14:26 PM	BCl3 MFC set to  0.000000
6/21/2010	7:14:26 PM	PHl3 MFC set to  0.000000
6/21/2010	7:14:26 PM	SiCl4 MFC set to  0.000000
6/21/2010	7:14:26 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	7:14:26 PM	Tube furnace set to 0
6/21/2010	7:14:27 PM	Helium valve closed
6/21/2010	7:14:27 PM	H2 valve closed
6/21/2010	7:14:27 PM	BCl3 valve closed
6/21/2010	7:14:27 PM	PH3 valve closed
6/21/2010	7:14:27 PM	SiCl4 pre valve closed
6/21/2010	7:14:27 PM	SiCl4 post valve closed
6/21/2010	7:14:27 PM	Main Vac valve closed
6/21/2010	7:14:27 PM	Bypass valve closed
6/21/2010	7:14:27 PM	Bubbler valve closed
6/21/2010	7:14:27 PM	Helium MFC set to  0.000000
6/21/2010	7:14:27 PM	H2 MFC set to  0.000000
6/21/2010	7:14:27 PM	BCl3 MFC set to  0.000000
6/21/2010	7:14:27 PM	PHl3 MFC set to  0.000000
6/21/2010	7:14:27 PM	SiCl4 MFC set to  0.000000
6/21/2010	7:14:27 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	7:14:27 PM	Tube furnace set to 0
6/21/2010	7:14:28 PM	Run finished at 7:14 PM
6/21/2010	7:14:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	7:16:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	7:16:44 PM	Recipe started at 7:16 PM
6/21/2010	7:16:44 PM	Helium valve closed
6/21/2010	7:16:44 PM	H2 valve closed
6/21/2010	7:16:44 PM	BCl3 valve closed
6/21/2010	7:16:44 PM	PH3 valve closed
6/21/2010	7:16:44 PM	SiCl4 pre valve closed
6/21/2010	7:16:44 PM	SiCl4 post valve closed
6/21/2010	7:16:44 PM	Main Vac valve closed
6/21/2010	7:16:44 PM	Bubbler valve closed
6/21/2010	7:16:44 PM	Bypass valve opened
6/21/2010	7:16:44 PM	Helium MFC set to  0.000000
6/21/2010	7:16:44 PM	H2 MFC set to  0.000000
6/21/2010	7:16:44 PM	BCl3 MFC set to  0.000000
6/21/2010	7:16:44 PM	PHl3 MFC set to  0.000000
6/21/2010	7:16:44 PM	SiCl4 MFC set to  0.000000
6/21/2010	7:16:44 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	7:16:44 PM	Tube furnace set to 0
6/21/2010	7:17:30 PM	Helium valve closed
6/21/2010	7:17:30 PM	H2 valve closed
6/21/2010	7:17:30 PM	BCl3 valve closed
6/21/2010	7:17:30 PM	PH3 valve closed
6/21/2010	7:17:30 PM	SiCl4 pre valve closed
6/21/2010	7:17:30 PM	SiCl4 post valve closed
6/21/2010	7:17:30 PM	Bubbler valve closed
6/21/2010	7:17:30 PM	Main Vac valve opened
6/21/2010	7:17:30 PM	Bypass valve opened
6/21/2010	7:17:30 PM	Helium MFC set to  0.000000
6/21/2010	7:17:30 PM	H2 MFC set to  0.000000
6/21/2010	7:17:30 PM	BCl3 MFC set to  0.000000
6/21/2010	7:17:30 PM	PHl3 MFC set to  0.000000
6/21/2010	7:17:30 PM	SiCl4 MFC set to  0.000000
6/21/2010	7:17:30 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	7:17:30 PM	Tube furnace set to 0
6/21/2010	7:17:30 PM	Run finished at 7:17 PM
6/21/2010	7:17:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	8:40:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	8:40:35 PM	Recipe started at 8:40 PM
6/21/2010	8:40:35 PM	H2 valve closed
6/21/2010	8:40:35 PM	BCl3 valve closed
6/21/2010	8:40:35 PM	PH3 valve closed
6/21/2010	8:40:35 PM	SiCl4 pre valve closed
6/21/2010	8:40:35 PM	SiCl4 post valve closed
6/21/2010	8:40:35 PM	Main Vac valve closed
6/21/2010	8:40:35 PM	Bypass valve closed
6/21/2010	8:40:35 PM	Bubbler valve closed
6/21/2010	8:40:35 PM	Helium valve opened
6/21/2010	8:40:35 PM	Helium MFC set to  500.000000
6/21/2010	8:40:35 PM	H2 MFC set to  0.000000
6/21/2010	8:40:35 PM	BCl3 MFC set to  0.000000
6/21/2010	8:40:35 PM	PHl3 MFC set to  0.000000
6/21/2010	8:40:35 PM	SiCl4 MFC set to  0.000000
6/21/2010	8:40:35 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	8:40:35 PM	Tube furnace set to 0
6/21/2010	8:41:35 PM	Helium valve closed
6/21/2010	8:41:35 PM	H2 valve closed
6/21/2010	8:41:35 PM	BCl3 valve closed
6/21/2010	8:41:35 PM	PH3 valve closed
6/21/2010	8:41:35 PM	SiCl4 pre valve closed
6/21/2010	8:41:35 PM	SiCl4 post valve closed
6/21/2010	8:41:35 PM	Main Vac valve closed
6/21/2010	8:41:35 PM	Bypass valve closed
6/21/2010	8:41:35 PM	Bubbler valve closed
6/21/2010	8:41:35 PM	Helium MFC set to  0.000000
6/21/2010	8:41:35 PM	H2 MFC set to  0.000000
6/21/2010	8:41:35 PM	BCl3 MFC set to  0.000000
6/21/2010	8:41:35 PM	PHl3 MFC set to  0.000000
6/21/2010	8:41:35 PM	SiCl4 MFC set to  0.000000
6/21/2010	8:41:35 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	8:41:35 PM	Tube furnace set to 0
6/21/2010	8:41:35 PM	Run finished at 8:41 PM
6/21/2010	8:41:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2010	8:51:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	8:51:15 PM	Recipe started at 8:51 PM
6/21/2010	8:51:15 PM	Helium valve closed
6/21/2010	8:51:15 PM	H2 valve closed
6/21/2010	8:51:15 PM	BCl3 valve closed
6/21/2010	8:51:15 PM	PH3 valve closed
6/21/2010	8:51:15 PM	SiCl4 pre valve closed
6/21/2010	8:51:15 PM	SiCl4 post valve closed
6/21/2010	8:51:15 PM	Main Vac valve closed
6/21/2010	8:51:15 PM	Bubbler valve closed
6/21/2010	8:51:15 PM	Bypass valve opened
6/21/2010	8:51:15 PM	Helium MFC set to  0.000000
6/21/2010	8:51:15 PM	H2 MFC set to  0.000000
6/21/2010	8:51:15 PM	BCl3 MFC set to  0.000000
6/21/2010	8:51:15 PM	PHl3 MFC set to  0.000000
6/21/2010	8:51:15 PM	SiCl4 MFC set to  0.000000
6/21/2010	8:51:15 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	8:51:15 PM	Tube furnace set to 0
6/21/2010	8:52:03 PM	Helium valve closed
6/21/2010	8:52:03 PM	H2 valve closed
6/21/2010	8:52:03 PM	BCl3 valve closed
6/21/2010	8:52:03 PM	PH3 valve closed
6/21/2010	8:52:03 PM	SiCl4 pre valve closed
6/21/2010	8:52:03 PM	SiCl4 post valve closed
6/21/2010	8:52:03 PM	Bubbler valve closed
6/21/2010	8:52:03 PM	Main Vac valve opened
6/21/2010	8:52:03 PM	Bypass valve opened
6/21/2010	8:52:03 PM	Helium MFC set to  0.000000
6/21/2010	8:52:04 PM	H2 MFC set to  0.000000
6/21/2010	8:52:04 PM	BCl3 MFC set to  0.000000
6/21/2010	8:52:04 PM	PHl3 MFC set to  0.000000
6/21/2010	8:52:04 PM	SiCl4 MFC set to  0.000000
6/21/2010	8:52:04 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	8:52:04 PM	Tube furnace set to 0
6/21/2010	8:52:04 PM	Run finished at 8:52 PM
6/21/2010	8:52:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	8:52:48 PM	Helium MFC set to  100.000000
6/21/2010	8:52:50 PM	Helium valve opened
6/21/2010	8:53:01 PM	Helium MFC set to  500.000000
6/21/2010	8:58:36 PM	Helium valve closed
6/21/2010	9:00:14 PM	Helium valve opened
6/21/2010	9:05:47 PM	Helium valve closed
6/21/2010	9:05:50 PM	Helium MFC set to  0.000000
6/21/2010	9:06:52 PM	Helium MFC set to  100.000000
6/21/2010	9:06:54 PM	Helium valve opened
6/21/2010	9:06:57 PM	Helium MFC set to  500.000000
6/21/2010	9:10:05 PM	Helium valve closed
6/21/2010	9:10:49 PM	Helium MFC set to  100.000000
6/21/2010	9:10:51 PM	Helium valve opened
6/21/2010	9:10:54 PM	Helium MFC set to  500.000000
6/21/2010	9:12:46 PM	Helium valve closed
6/21/2010	9:13:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/21/2010	9:13:36 PM	Recipe started at 9:13 PM
6/21/2010	9:13:36 PM	Helium valve closed
6/21/2010	9:13:36 PM	H2 valve closed
6/21/2010	9:13:36 PM	BCl3 valve closed
6/21/2010	9:13:36 PM	PH3 valve closed
6/21/2010	9:13:36 PM	SiCl4 pre valve closed
6/21/2010	9:13:36 PM	SiCl4 post valve closed
6/21/2010	9:13:36 PM	Main Vac valve closed
6/21/2010	9:13:36 PM	Bypass valve closed
6/21/2010	9:13:36 PM	Bubbler valve closed
6/21/2010	9:13:36 PM	Helium MFC set to  0.000000
6/21/2010	9:13:36 PM	H2 MFC set to  0.000000
6/21/2010	9:13:36 PM	BCl3 MFC set to  0.000000
6/21/2010	9:13:36 PM	PHl3 MFC set to  0.000000
6/21/2010	9:13:36 PM	SiCl4 MFC set to  0.000000
6/21/2010	9:13:36 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	9:13:36 PM	Tube furnace set to 0
6/21/2010	9:13:36 PM	Run finished at 9:13 PM
6/21/2010	9:13:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/21/2010	9:13:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	9:13:57 PM	Recipe started at 9:13 PM
6/21/2010	9:13:57 PM	Helium valve closed
6/21/2010	9:13:57 PM	H2 valve closed
6/21/2010	9:13:57 PM	BCl3 valve closed
6/21/2010	9:13:57 PM	PH3 valve closed
6/21/2010	9:13:57 PM	SiCl4 pre valve closed
6/21/2010	9:13:57 PM	SiCl4 post valve closed
6/21/2010	9:13:57 PM	Main Vac valve closed
6/21/2010	9:13:57 PM	Bubbler valve closed
6/21/2010	9:13:57 PM	Bypass valve opened
6/21/2010	9:13:57 PM	Helium MFC set to  0.000000
6/21/2010	9:13:57 PM	H2 MFC set to  0.000000
6/21/2010	9:13:57 PM	BCl3 MFC set to  0.000000
6/21/2010	9:13:57 PM	PHl3 MFC set to  0.000000
6/21/2010	9:13:57 PM	SiCl4 MFC set to  0.000000
6/21/2010	9:13:57 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	9:13:58 PM	Tube furnace set to 0
6/21/2010	9:13:58 PM	Helium valve closed
6/21/2010	9:13:58 PM	H2 valve closed
6/21/2010	9:13:58 PM	BCl3 valve closed
6/21/2010	9:13:58 PM	PH3 valve closed
6/21/2010	9:13:58 PM	SiCl4 pre valve closed
6/21/2010	9:13:58 PM	SiCl4 post valve closed
6/21/2010	9:13:58 PM	Bubbler valve closed
6/21/2010	9:13:58 PM	Main Vac valve opened
6/21/2010	9:13:58 PM	Bypass valve opened
6/21/2010	9:13:58 PM	Helium MFC set to  0.000000
6/21/2010	9:13:58 PM	H2 MFC set to  0.000000
6/21/2010	9:13:58 PM	BCl3 MFC set to  0.000000
6/21/2010	9:13:58 PM	PHl3 MFC set to  0.000000
6/21/2010	9:13:58 PM	SiCl4 MFC set to  0.000000
6/21/2010	9:13:58 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	9:13:58 PM	Tube furnace set to 0
6/21/2010	9:13:58 PM	Run finished at 9:13 PM
6/21/2010	9:13:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	9:15:32 PM	Helium MFC set to  100.000000
6/21/2010	9:15:33 PM	Helium valve opened
6/21/2010	9:15:38 PM	Helium MFC set to  500.000000
6/21/2010	9:18:11 PM	Helium valve closed
6/21/2010	9:18:46 PM	Helium valve opened
6/21/2010	9:25:58 PM	Helium valve closed
6/21/2010	9:26:46 PM	Helium valve opened
6/21/2010	9:30:54 PM	Helium valve closed
6/21/2010	9:30:56 PM	Helium MFC set to  0.000000
6/21/2010	9:31:41 PM	Helium MFC set to  100.000000
6/21/2010	9:31:42 PM	Helium valve opened
6/21/2010	9:31:42 PM	Helium valve closed
6/21/2010	9:31:43 PM	Helium valve opened
6/21/2010	9:31:48 PM	Helium MFC set to  500.000000
6/21/2010	9:35:18 PM	Helium valve closed
6/21/2010	9:35:21 PM	Helium MFC set to  0.000000
6/21/2010	9:36:10 PM	Recipe started at 9:36 PM
6/21/2010	9:36:10 PM	Helium valve closed
6/21/2010	9:36:10 PM	BCl3 valve closed
6/21/2010	9:36:10 PM	PH3 valve closed
6/21/2010	9:36:10 PM	SiCl4 pre valve closed
6/21/2010	9:36:10 PM	SiCl4 post valve closed
6/21/2010	9:36:10 PM	Main Vac valve closed
6/21/2010	9:36:10 PM	Bypass valve closed
6/21/2010	9:36:10 PM	Bubbler valve closed
6/21/2010	9:36:10 PM	H2 valve opened
6/21/2010	9:36:10 PM	Helium MFC set to  0.000000
6/21/2010	9:36:10 PM	H2 MFC set to  500.000000
6/21/2010	9:36:10 PM	BCl3 MFC set to  0.000000
6/21/2010	9:36:10 PM	PHl3 MFC set to  0.000000
6/21/2010	9:36:10 PM	SiCl4 MFC set to  0.000000
6/21/2010	9:36:10 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	9:36:10 PM	Tube furnace set to 1000
6/21/2010	9:37:33 PM	Helium valve closed
6/21/2010	9:37:33 PM	BCl3 valve closed
6/21/2010	9:37:33 PM	PH3 valve closed
6/21/2010	9:37:33 PM	SiCl4 pre valve closed
6/21/2010	9:37:33 PM	SiCl4 post valve closed
6/21/2010	9:37:33 PM	Main Vac valve closed
6/21/2010	9:37:33 PM	Bypass valve closed
6/21/2010	9:37:33 PM	H2 valve opened
6/21/2010	9:37:33 PM	Bubbler valve opened
6/21/2010	9:37:33 PM	Helium MFC set to  0.000000
6/21/2010	9:37:33 PM	H2 MFC set to  500.000000
6/21/2010	9:37:33 PM	BCl3 MFC set to  0.000000
6/21/2010	9:37:33 PM	PHl3 MFC set to  0.000000
6/21/2010	9:37:33 PM	SiCl4 MFC set to  0.000000
6/21/2010	9:37:33 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	9:37:33 PM	Tube furnace set to 1000
6/21/2010	9:57:33 PM	Helium valve closed
6/21/2010	9:57:33 PM	PH3 valve closed
6/21/2010	9:57:33 PM	Main Vac valve closed
6/21/2010	9:57:33 PM	Bypass valve closed
6/21/2010	9:57:33 PM	H2 valve opened
6/21/2010	9:57:33 PM	BCl3 valve opened
6/21/2010	9:57:33 PM	SiCl4 pre valve opened
6/21/2010	9:57:33 PM	SiCl4 post valve opened
6/21/2010	9:57:33 PM	Bubbler valve opened
6/21/2010	9:57:33 PM	Helium MFC set to  0.000000
6/21/2010	9:57:33 PM	H2 MFC set to  500.000000
6/21/2010	9:57:33 PM	BCl3 MFC set to  35.000000
6/21/2010	9:57:33 PM	PHl3 MFC set to  0.000000
6/21/2010	9:57:33 PM	SiCl4 MFC set to  50.000000
6/21/2010	9:57:33 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	9:57:33 PM	Tube furnace set to 1000
6/21/2010	10:12:33 PM	Helium valve closed
6/21/2010	10:12:33 PM	BCl3 valve closed
6/21/2010	10:12:33 PM	PH3 valve closed
6/21/2010	10:12:33 PM	SiCl4 pre valve closed
6/21/2010	10:12:33 PM	SiCl4 post valve closed
6/21/2010	10:12:33 PM	Main Vac valve closed
6/21/2010	10:12:33 PM	Bypass valve closed
6/21/2010	10:12:33 PM	H2 valve opened
6/21/2010	10:12:33 PM	Bubbler valve opened
6/21/2010	10:12:33 PM	Helium MFC set to  0.000000
6/21/2010	10:12:33 PM	H2 MFC set to  500.000000
6/21/2010	10:12:33 PM	BCl3 MFC set to  0.000000
6/21/2010	10:12:33 PM	PHl3 MFC set to  0.000000
6/21/2010	10:12:33 PM	SiCl4 MFC set to  0.000000
6/21/2010	10:12:33 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	10:12:34 PM	Tube furnace set to 750
6/21/2010	10:32:34 PM	H2 valve closed
6/21/2010	10:32:34 PM	BCl3 valve closed
6/21/2010	10:32:34 PM	PH3 valve closed
6/21/2010	10:32:34 PM	SiCl4 pre valve closed
6/21/2010	10:32:34 PM	SiCl4 post valve closed
6/21/2010	10:32:34 PM	Main Vac valve closed
6/21/2010	10:32:34 PM	Bypass valve closed
6/21/2010	10:32:34 PM	Helium valve opened
6/21/2010	10:32:34 PM	Bubbler valve opened
6/21/2010	10:32:34 PM	Helium MFC set to  500.000000
6/21/2010	10:32:34 PM	H2 MFC set to  0.000000
6/21/2010	10:32:34 PM	BCl3 MFC set to  0.000000
6/21/2010	10:32:34 PM	PHl3 MFC set to  0.000000
6/21/2010	10:32:34 PM	SiCl4 MFC set to  0.000000
6/21/2010	10:32:34 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	10:32:34 PM	Tube furnace set to 0
6/21/2010	10:43:01 PM	Run aborted at 10:43 PM
6/21/2010	10:43:01 PM	Helium valve closed
6/21/2010	10:43:01 PM	H2 valve closed
6/21/2010	10:43:01 PM	BCl3 valve closed
6/21/2010	10:43:01 PM	PH3 valve closed
6/21/2010	10:43:01 PM	SiCl4 pre valve closed
6/21/2010	10:43:01 PM	SiCl4 post valve closed
6/21/2010	10:43:01 PM	Bypass valve closed
6/21/2010	10:43:01 PM	Main Vac valve closed
6/21/2010	10:43:01 PM	Bubbler valve closed
6/21/2010	10:43:01 PM	Helium MFC set to  0.000000
6/21/2010	10:43:01 PM	H2 MFC set to  0.000000
6/21/2010	10:43:01 PM	BCl3 MFC set to  0.000000
6/21/2010	10:43:01 PM	PHl3 MFC set to  0.000000
6/21/2010	10:43:01 PM	SiCl4 MFC set to  0.000000
6/21/2010	10:43:02 PM	Tube furnace set to 0
6/21/2010	11:30:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	11:30:19 PM	Recipe started at 11:30 PM
6/21/2010	11:30:19 PM	Helium valve closed
6/21/2010	11:30:19 PM	H2 valve closed
6/21/2010	11:30:19 PM	BCl3 valve closed
6/21/2010	11:30:19 PM	PH3 valve closed
6/21/2010	11:30:19 PM	SiCl4 pre valve closed
6/21/2010	11:30:19 PM	SiCl4 post valve closed
6/21/2010	11:30:19 PM	Main Vac valve closed
6/21/2010	11:30:19 PM	Bubbler valve closed
6/21/2010	11:30:19 PM	Bypass valve opened
6/21/2010	11:30:19 PM	Helium MFC set to  0.000000
6/21/2010	11:30:19 PM	H2 MFC set to  0.000000
6/21/2010	11:30:19 PM	BCl3 MFC set to  0.000000
6/21/2010	11:30:19 PM	PHl3 MFC set to  0.000000
6/21/2010	11:30:19 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:30:19 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:30:19 PM	Tube furnace set to 0
6/21/2010	11:31:08 PM	Helium valve closed
6/21/2010	11:31:08 PM	H2 valve closed
6/21/2010	11:31:08 PM	BCl3 valve closed
6/21/2010	11:31:08 PM	PH3 valve closed
6/21/2010	11:31:08 PM	SiCl4 pre valve closed
6/21/2010	11:31:08 PM	SiCl4 post valve closed
6/21/2010	11:31:08 PM	Bubbler valve closed
6/21/2010	11:31:08 PM	Main Vac valve opened
6/21/2010	11:31:08 PM	Bypass valve opened
6/21/2010	11:31:08 PM	Helium MFC set to  0.000000
6/21/2010	11:31:08 PM	H2 MFC set to  0.000000
6/21/2010	11:31:08 PM	BCl3 MFC set to  0.000000
6/21/2010	11:31:08 PM	PHl3 MFC set to  0.000000
6/21/2010	11:31:08 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:31:08 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:31:08 PM	Tube furnace set to 0
6/21/2010	11:31:09 PM	Run finished at 11:31 PM
6/21/2010	11:31:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	11:32:14 PM	Program started after a nonstandard shutdown
6/21/2010	11:32:15 PM	Helium valve closed
6/21/2010	11:32:15 PM	H2 valve closed
6/21/2010	11:32:15 PM	BCl3 valve closed
6/21/2010	11:32:15 PM	PH3 valve closed
6/21/2010	11:32:15 PM	SiCl4 pre valve closed
6/21/2010	11:32:15 PM	SiCl4 post valve closed
6/21/2010	11:32:15 PM	Main Vac valve closed
6/21/2010	11:32:15 PM	Bypass valve closed
6/21/2010	11:32:15 PM	Bubbler valve closed
6/21/2010	11:32:15 PM	Helium MFC set to  0.000000
6/21/2010	11:32:15 PM	H2 MFC set to  0.000000
6/21/2010	11:32:15 PM	BCl3 MFC set to  0.000000
6/21/2010	11:32:15 PM	PHl3 MFC set to  0.000000
6/21/2010	11:32:15 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:32:15 PM	Bypass solenoid MFC set to  760.000000
6/21/2010	11:32:15 PM	Tube furnace set to 0
6/21/2010	11:32:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	11:32:19 PM	Recipe started at 11:32 PM
6/21/2010	11:32:19 PM	Helium valve closed
6/21/2010	11:32:19 PM	H2 valve closed
6/21/2010	11:32:19 PM	BCl3 valve closed
6/21/2010	11:32:19 PM	PH3 valve closed
6/21/2010	11:32:19 PM	SiCl4 pre valve closed
6/21/2010	11:32:19 PM	SiCl4 post valve closed
6/21/2010	11:32:19 PM	Main Vac valve closed
6/21/2010	11:32:19 PM	Bubbler valve closed
6/21/2010	11:32:19 PM	Bypass valve opened
6/21/2010	11:32:19 PM	Helium MFC set to  0.000000
6/21/2010	11:32:19 PM	H2 MFC set to  0.000000
6/21/2010	11:32:19 PM	BCl3 MFC set to  0.000000
6/21/2010	11:32:19 PM	PHl3 MFC set to  0.000000
6/21/2010	11:32:19 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:32:19 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:32:19 PM	Tube furnace set to 0
6/21/2010	11:32:19 PM	Helium valve closed
6/21/2010	11:32:19 PM	H2 valve closed
6/21/2010	11:32:19 PM	BCl3 valve closed
6/21/2010	11:32:19 PM	PH3 valve closed
6/21/2010	11:32:19 PM	SiCl4 pre valve closed
6/21/2010	11:32:19 PM	SiCl4 post valve closed
6/21/2010	11:32:19 PM	Bubbler valve closed
6/21/2010	11:32:19 PM	Main Vac valve opened
6/21/2010	11:32:19 PM	Bypass valve opened
6/21/2010	11:32:19 PM	Helium MFC set to  0.000000
6/21/2010	11:32:19 PM	H2 MFC set to  0.000000
6/21/2010	11:32:19 PM	BCl3 MFC set to  0.000000
6/21/2010	11:32:19 PM	PHl3 MFC set to  0.000000
6/21/2010	11:32:19 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:32:19 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:32:19 PM	Tube furnace set to 0
6/21/2010	11:32:20 PM	Run finished at 11:32 PM
6/21/2010	11:32:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2010	11:32:53 PM	Helium MFC set to  500.000000
6/21/2010	11:32:54 PM	Helium valve opened
6/21/2010	11:33:55 PM	Helium valve closed
6/21/2010	11:34:13 PM	Helium valve opened
6/21/2010	11:34:42 PM	Helium valve closed
6/21/2010	11:35:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/21/2010	11:35:16 PM	Recipe started at 11:35 PM
6/21/2010	11:35:16 PM	H2 valve closed
6/21/2010	11:35:16 PM	BCl3 valve closed
6/21/2010	11:35:16 PM	PH3 valve closed
6/21/2010	11:35:16 PM	SiCl4 pre valve closed
6/21/2010	11:35:16 PM	SiCl4 post valve closed
6/21/2010	11:35:16 PM	Main Vac valve closed
6/21/2010	11:35:16 PM	Bypass valve closed
6/21/2010	11:35:16 PM	Bubbler valve closed
6/21/2010	11:35:16 PM	Helium valve opened
6/21/2010	11:35:16 PM	Helium MFC set to  500.000000
6/21/2010	11:35:16 PM	H2 MFC set to  0.000000
6/21/2010	11:35:16 PM	BCl3 MFC set to  0.000000
6/21/2010	11:35:16 PM	PHl3 MFC set to  0.000000
6/21/2010	11:35:16 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:35:16 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:35:16 PM	Tube furnace set to 0
6/21/2010	11:36:37 PM	Helium valve closed
6/21/2010	11:36:37 PM	H2 valve closed
6/21/2010	11:36:37 PM	BCl3 valve closed
6/21/2010	11:36:37 PM	PH3 valve closed
6/21/2010	11:36:37 PM	SiCl4 pre valve closed
6/21/2010	11:36:37 PM	SiCl4 post valve closed
6/21/2010	11:36:37 PM	Main Vac valve closed
6/21/2010	11:36:37 PM	Bypass valve closed
6/21/2010	11:36:37 PM	Bubbler valve closed
6/21/2010	11:36:37 PM	Helium MFC set to  0.000000
6/21/2010	11:36:37 PM	H2 MFC set to  0.000000
6/21/2010	11:36:37 PM	BCl3 MFC set to  0.000000
6/21/2010	11:36:37 PM	PHl3 MFC set to  0.000000
6/21/2010	11:36:37 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:36:37 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:36:37 PM	Tube furnace set to 0
6/21/2010	11:36:52 PM	Helium valve closed
6/21/2010	11:36:52 PM	H2 valve closed
6/21/2010	11:36:52 PM	BCl3 valve closed
6/21/2010	11:36:52 PM	PH3 valve closed
6/21/2010	11:36:52 PM	SiCl4 pre valve closed
6/21/2010	11:36:52 PM	SiCl4 post valve closed
6/21/2010	11:36:52 PM	Main Vac valve closed
6/21/2010	11:36:52 PM	Bubbler valve closed
6/21/2010	11:36:52 PM	Bypass valve opened
6/21/2010	11:36:52 PM	Helium MFC set to  0.000000
6/21/2010	11:36:52 PM	H2 MFC set to  0.000000
6/21/2010	11:36:52 PM	BCl3 MFC set to  0.000000
6/21/2010	11:36:52 PM	PHl3 MFC set to  0.000000
6/21/2010	11:36:52 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:36:52 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:36:52 PM	Tube furnace set to 0
6/21/2010	11:37:26 PM	Helium valve closed
6/21/2010	11:37:26 PM	H2 valve closed
6/21/2010	11:37:26 PM	BCl3 valve closed
6/21/2010	11:37:26 PM	PH3 valve closed
6/21/2010	11:37:26 PM	SiCl4 pre valve closed
6/21/2010	11:37:26 PM	SiCl4 post valve closed
6/21/2010	11:37:26 PM	Bubbler valve closed
6/21/2010	11:37:26 PM	Main Vac valve opened
6/21/2010	11:37:26 PM	Bypass valve opened
6/21/2010	11:37:26 PM	Helium MFC set to  0.000000
6/21/2010	11:37:26 PM	H2 MFC set to  0.000000
6/21/2010	11:37:26 PM	BCl3 MFC set to  0.000000
6/21/2010	11:37:26 PM	PHl3 MFC set to  0.000000
6/21/2010	11:37:26 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:37:26 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:37:26 PM	Tube furnace set to 0
6/21/2010	11:42:26 PM	H2 valve closed
6/21/2010	11:42:26 PM	BCl3 valve closed
6/21/2010	11:42:26 PM	PH3 valve closed
6/21/2010	11:42:26 PM	SiCl4 pre valve closed
6/21/2010	11:42:26 PM	SiCl4 post valve closed
6/21/2010	11:42:26 PM	Main Vac valve closed
6/21/2010	11:42:26 PM	Bypass valve closed
6/21/2010	11:42:26 PM	Bubbler valve closed
6/21/2010	11:42:26 PM	Helium valve opened
6/21/2010	11:42:26 PM	Helium MFC set to  500.000000
6/21/2010	11:42:26 PM	H2 MFC set to  0.000000
6/21/2010	11:42:26 PM	BCl3 MFC set to  0.000000
6/21/2010	11:42:26 PM	PHl3 MFC set to  0.000000
6/21/2010	11:42:26 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:42:26 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:42:26 PM	Tube furnace set to 0
6/21/2010	11:43:46 PM	Helium valve closed
6/21/2010	11:43:46 PM	H2 valve closed
6/21/2010	11:43:46 PM	BCl3 valve closed
6/21/2010	11:43:46 PM	PH3 valve closed
6/21/2010	11:43:46 PM	SiCl4 pre valve closed
6/21/2010	11:43:46 PM	SiCl4 post valve closed
6/21/2010	11:43:46 PM	Main Vac valve closed
6/21/2010	11:43:46 PM	Bypass valve closed
6/21/2010	11:43:46 PM	Bubbler valve closed
6/21/2010	11:43:46 PM	Helium MFC set to  0.000000
6/21/2010	11:43:46 PM	H2 MFC set to  0.000000
6/21/2010	11:43:46 PM	BCl3 MFC set to  0.000000
6/21/2010	11:43:46 PM	PHl3 MFC set to  0.000000
6/21/2010	11:43:46 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:43:46 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:43:46 PM	Tube furnace set to 0
6/21/2010	11:44:01 PM	Helium valve closed
6/21/2010	11:44:01 PM	H2 valve closed
6/21/2010	11:44:01 PM	BCl3 valve closed
6/21/2010	11:44:01 PM	PH3 valve closed
6/21/2010	11:44:01 PM	SiCl4 pre valve closed
6/21/2010	11:44:01 PM	SiCl4 post valve closed
6/21/2010	11:44:01 PM	Main Vac valve closed
6/21/2010	11:44:01 PM	Bubbler valve closed
6/21/2010	11:44:01 PM	Bypass valve opened
6/21/2010	11:44:01 PM	Helium MFC set to  0.000000
6/21/2010	11:44:01 PM	H2 MFC set to  0.000000
6/21/2010	11:44:01 PM	BCl3 MFC set to  0.000000
6/21/2010	11:44:01 PM	PHl3 MFC set to  0.000000
6/21/2010	11:44:01 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:44:01 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:44:02 PM	Tube furnace set to 0
6/21/2010	11:44:35 PM	Helium valve closed
6/21/2010	11:44:35 PM	H2 valve closed
6/21/2010	11:44:35 PM	BCl3 valve closed
6/21/2010	11:44:35 PM	PH3 valve closed
6/21/2010	11:44:35 PM	SiCl4 pre valve closed
6/21/2010	11:44:35 PM	SiCl4 post valve closed
6/21/2010	11:44:35 PM	Bubbler valve closed
6/21/2010	11:44:35 PM	Main Vac valve opened
6/21/2010	11:44:35 PM	Bypass valve opened
6/21/2010	11:44:35 PM	Helium MFC set to  0.000000
6/21/2010	11:44:35 PM	H2 MFC set to  0.000000
6/21/2010	11:44:35 PM	BCl3 MFC set to  0.000000
6/21/2010	11:44:35 PM	PHl3 MFC set to  0.000000
6/21/2010	11:44:35 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:44:35 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:44:35 PM	Tube furnace set to 0
6/21/2010	11:49:35 PM	H2 valve closed
6/21/2010	11:49:35 PM	BCl3 valve closed
6/21/2010	11:49:35 PM	PH3 valve closed
6/21/2010	11:49:35 PM	SiCl4 pre valve closed
6/21/2010	11:49:35 PM	SiCl4 post valve closed
6/21/2010	11:49:35 PM	Main Vac valve closed
6/21/2010	11:49:35 PM	Bypass valve closed
6/21/2010	11:49:35 PM	Bubbler valve closed
6/21/2010	11:49:35 PM	Helium valve opened
6/21/2010	11:49:35 PM	Helium MFC set to  500.000000
6/21/2010	11:49:35 PM	H2 MFC set to  0.000000
6/21/2010	11:49:35 PM	BCl3 MFC set to  0.000000
6/21/2010	11:49:35 PM	PHl3 MFC set to  0.000000
6/21/2010	11:49:35 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:49:35 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:49:35 PM	Tube furnace set to 0
6/21/2010	11:50:55 PM	Helium valve closed
6/21/2010	11:50:55 PM	H2 valve closed
6/21/2010	11:50:55 PM	BCl3 valve closed
6/21/2010	11:50:55 PM	PH3 valve closed
6/21/2010	11:50:55 PM	SiCl4 pre valve closed
6/21/2010	11:50:55 PM	SiCl4 post valve closed
6/21/2010	11:50:55 PM	Main Vac valve closed
6/21/2010	11:50:55 PM	Bypass valve closed
6/21/2010	11:50:55 PM	Bubbler valve closed
6/21/2010	11:50:55 PM	Helium MFC set to  0.000000
6/21/2010	11:50:55 PM	H2 MFC set to  0.000000
6/21/2010	11:50:55 PM	BCl3 MFC set to  0.000000
6/21/2010	11:50:55 PM	PHl3 MFC set to  0.000000
6/21/2010	11:50:55 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:50:55 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:50:55 PM	Tube furnace set to 0
6/21/2010	11:51:10 PM	Helium valve closed
6/21/2010	11:51:10 PM	H2 valve closed
6/21/2010	11:51:10 PM	BCl3 valve closed
6/21/2010	11:51:10 PM	PH3 valve closed
6/21/2010	11:51:10 PM	SiCl4 pre valve closed
6/21/2010	11:51:10 PM	SiCl4 post valve closed
6/21/2010	11:51:10 PM	Main Vac valve closed
6/21/2010	11:51:10 PM	Bubbler valve closed
6/21/2010	11:51:10 PM	Bypass valve opened
6/21/2010	11:51:10 PM	Helium MFC set to  0.000000
6/21/2010	11:51:10 PM	H2 MFC set to  0.000000
6/21/2010	11:51:10 PM	BCl3 MFC set to  0.000000
6/21/2010	11:51:10 PM	PHl3 MFC set to  0.000000
6/21/2010	11:51:10 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:51:10 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:51:11 PM	Tube furnace set to 0
6/21/2010	11:51:44 PM	Helium valve closed
6/21/2010	11:51:44 PM	H2 valve closed
6/21/2010	11:51:44 PM	BCl3 valve closed
6/21/2010	11:51:44 PM	PH3 valve closed
6/21/2010	11:51:44 PM	SiCl4 pre valve closed
6/21/2010	11:51:44 PM	SiCl4 post valve closed
6/21/2010	11:51:44 PM	Bubbler valve closed
6/21/2010	11:51:44 PM	Main Vac valve opened
6/21/2010	11:51:44 PM	Bypass valve opened
6/21/2010	11:51:44 PM	Helium MFC set to  0.000000
6/21/2010	11:51:44 PM	H2 MFC set to  0.000000
6/21/2010	11:51:44 PM	BCl3 MFC set to  0.000000
6/21/2010	11:51:44 PM	PHl3 MFC set to  0.000000
6/21/2010	11:51:44 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:51:44 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:51:44 PM	Tube furnace set to 0
6/21/2010	11:56:44 PM	Helium valve closed
6/21/2010	11:56:44 PM	H2 valve closed
6/21/2010	11:56:44 PM	BCl3 valve closed
6/21/2010	11:56:44 PM	PH3 valve closed
6/21/2010	11:56:44 PM	SiCl4 pre valve closed
6/21/2010	11:56:44 PM	SiCl4 post valve closed
6/21/2010	11:56:44 PM	Bubbler valve closed
6/21/2010	11:56:44 PM	Main Vac valve opened
6/21/2010	11:56:44 PM	Bypass valve opened
6/21/2010	11:56:44 PM	Helium MFC set to  0.000000
6/21/2010	11:56:44 PM	H2 MFC set to  0.000000
6/21/2010	11:56:44 PM	BCl3 MFC set to  0.000000
6/21/2010	11:56:44 PM	PHl3 MFC set to  0.000000
6/21/2010	11:56:44 PM	SiCl4 MFC set to  0.000000
6/21/2010	11:56:44 PM	Bypass solenoid MFC set to  0.000000
6/21/2010	11:56:44 PM	Tube furnace set to 0
6/21/2010	11:56:45 PM	Run finished at 11:56 PM
6/21/2010	11:56:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
